Radiant heating element, radiant heater and MOCVD reactor
A radiant heater, radiant heating technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of heating the substrate to 1400 ℃ and higher temperature, to improve the structure and increase the power Effect
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[0031] A radiant heating element, which is made of a heating sheet 17 wound symmetrically with an axis, and the section of the heating sheet 17 is a special-shaped section, such as image 3 As shown, the section of the heating plate 17 is V-shaped; Figure 4 As shown, the section of the heating sheet 17 is U-shaped; Figure 5 As shown, the cross section of the heating sheet 17 is a trapezoid.
[0032] like Image 6 As shown, an MOCVD reactor includes a reactor shell 8, 4 groups of gas ports 1, 2, 3, 4 on the top surface of the reactor shell 8, and an upper part of the reactor shell 8 for placing the substrate 15. The substrate carrier tray 5, the radiant heater below the substrate carrier tray 5, the gas distribution device 6 on the top surface inside the reactor shell 8, the bottom center of the substrate carrier tray 5 is provided with a rotating support shaft 11; the reactor shell The bottom of the body 8 is provided with an air outlet 10 . The first gas port 1 is conne...
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