A kind of neutral gray-scale light reduction filter with multi-layer film layer and its manufacturing method
A neutral gray scale, multi-layer film technology, applied in the direction of optics, optical filters, optical components, etc., can solve problems such as ghost images easily, and achieve good effects, low reflectivity, and good light balance attenuation
Active Publication Date: 2016-07-06
吉林省杨天光电有限公司
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Problems solved by technology
However, due to the high reflectivity, it is easy to produce ghost images and other phenomena during use.
Method used
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[0029] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0030] The neutral gray-scale light reduction filter of multi-layer film layer comprises a substrate, and several layers of film layers are coated on the substrate, and the film layer includes laminated anti-reflection films and metal films, and at least A layer of anti-reflection film, and a multi-layer anti-reflection film may also be provided between two adjacent metal films, and the refractive index of the constituent material of the anti-reflection film is greater than 1.30.
[0031] Preferably, the constituent material of the anti-reflection film includes at least one selected from Al2 o 3 , AlF 3 , BeO, CaF 2 , CeF 3 ,
[0032] CeO 3 、Cr 2 o 3 、Dy 2 o 3 、Gd 2 o 3 , HfO 2 、Ho 2 o 3 、In 2 o 3 、LaF 3 , MgF 2 ...
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Abstract
The invention provides a neutral grey level ND filter of multiple film layers and a manufacturing method thereof. The neutral grey level ND filter comprises a substrate which is plated with a plurality of film layers, and the film layers comprise antireflection films and metal films which are overlapped. At least one antireflection film is arranged between two adjacent metal films, and the refractive index of the materials forming the antireflection films is higher than 1.30. The manufacturing method of the neutral grey level ND filter of the multiple film layers comprises the steps that (1) a coating umbrella is arranged on the top of a cavity of a vacuum chamber, a rotation shaft of the coating umbrella is provided with a power source, two coating material sources are arranged at the bottom of the cavity of the vacuum chamber, a correction plate is fixed in the vacuum chamber, one end of the correction plate is located on the same side of the two coating material sources, and a vacuum pump is used for pumping the vacuum chamber to a preset vacuum degree; (2) the power source drives the coating umbrella to rotate, the two coating material sources are used for achieving evaporation of the film layers in an alternating mode, and the film layers are sequentially overlapped according to the preset optical thickness and a preset sequence.
Description
technical field [0001] The invention relates to a neutral gray scale light reduction filter, in particular to a neutral gray fixed value light reduction filter and a neutral gray gradient light reduction filter with multi-layer film layers and a manufacturing method thereof. Background technique [0002] The neutral gray filter is an energy splitting element for balanced attenuation of light. It is mainly used to filter light in photography and video recording. It has the advantages of simple structure and wide wavelength range. The neutral gray filter includes a neutral density filter (NeutralDensityFilter, referred to as an ND filter) and a neutral gray gradient filter (GraduatedNeutralDensityFilter, referred to as a GND filter). [0003] The ND mirror is mainly used to reduce the exposure of the camera. When the subject is bright, you need to use the ND mirror to reduce the exposure. The effect of ND filter on light is non-selective. The ability of ND mirror to reduce li...
Claims
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IPC IPC(8): G02B5/20G02B1/113G02B1/115
CPCG02B1/113G02B1/115G02B5/205
Inventor 孙义昌
Owner 吉林省杨天光电有限公司