Piezoelectric static composite-type low-frequency vibration energy collector

Abstract

The invention discloses a piezoelectric static composite-type low-frequency vibration energy collector which comprises a mass block, a PVDF film, a flexible variable capacitor and a silicon substrate. The flexible variable capacitor comprises a PDMS flexible cavity, a PDMS carbon nano tube upper electrode and a PDMS carbon nano tube lower electrode, the PDMS carbon nano tube upper electrode and the PDMS carbon nano tube lower electrode are located on the upper surface and the lower surface of the cavity respectively. The PVDF film is arranged on the PDMS carbon nano tube upper electrode of the flexible variable capacitor, and the PDMS carbon nano tube lower electrode of the flexible variable capacitor is fixed to the silicon substrate. The mass block is used for reducing work frequency of a device. According to the energy collector, an MEMS transducer can obtain large output power and high energy conversion efficiency in a low-frequency vibration environment; the energy collector is simple in structure, easy to manufacture, small in size and capable of operating in the low-frequency environment and has high energy conversion efficiency in an environment vibration range.

Description

technical field [0001] The present invention relates to a device in the field of energy technology, in particular to a piezoelectric-static composite low-frequency vibration energy harvester. Background technique [0002] In recent years, with the continuous development of MEMS (Micro-Electro-Mechanical Systems) technology, the application range of micro-systems such as micro-sensors and micro-electronic devices has continued to expand, and has been widely used in medicine, military affairs, and the Internet of Things. and other fields. Since these devices are portable, the performance and quality of their power supply is critical for most current MEMS technology applications. The traditional electrochemical battery power supply method has the disadvantages of short life, limited energy storage, and the need for regular replacement, so it cannot provide a good power solution. Therefore, people intend to use environmental vibration energy harvesting technology to solve the ...

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Problems solved by technology

[0006] The purpose of the present invention is to overcome the deficiencies of the prior art, and propose a piezoelectric electrostatic composite low-frequency vibration energy harvester based on PVDF (polyvinylidene fluoride) material, so that the transducer element can obtain a larger output in a low-frequency vibration environment power to solve the problems of high natural frequency and low output power of traditional MEMS piezoelectric energy harvesters

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