A high-sensitivity laminated flexoelectric pressure sensor

Abstract

A high-sensitivity laminated type flexoelectric pressure sensor comprises a metal elastic element for measuring mechanical deformation caused by micro-pressure. A plurality of flexoelectric dielectric films are attached to the top of the metal elastic element. The upper surface of each flexoelectric dielectric film and the lower surface of the flexoelectric dielectric film are provided with an upper metal electrode and a lower metal electrode respectively, each upper metal electrode and the corresponding lower metal electrode are separated through an insulating layer, the upper metal electrode of each flexoelectric dielectric film and the lower metal electrode of the flexoelectric dielectric film are respectively connected with a lead for outputting a measured load signal, each flexoelectric dielectric film together with the upper metal electrode, the lower metal electrode and the insulating layer is arranged in a shell, one end of each lead is led out of the shell, an insulating gasket is arranged between the metal elastic element and the shell, and a pressure channel for executing pressure is arranged at the lower portion of the metal elastic element. According to the high-sensitivity laminated type flexoelectric pressure sensor, pressure exerted on the films is measured through the linear relation between the exerted pressure and the stress gradient of mechanical deformation in the metal elastic element, output loads are improved through laminating, sensitivity is improved, and pressure can be accurately and easily measured.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a high-sensitivity stacked flexoelectric pressure sensor. Background technique [0002] Traditional piezoelectric sensors are made by using the phenomenon that some dielectric materials have piezoelectric effect after being stressed. The piezoelectric effect refers to the phenomenon that when certain dielectrics are deformed (bent or stretched) by external forces in a certain direction, charge accumulation occurs on the surface due to the polarization of internal charges. Piezoelectric sensors measure surface charges and use electromechanical coupling to achieve other non-electrical measurements. Piezoelectric sensors have small size, small mass, low energy consumption, high sensitivity to dynamic measurement, and are suitable for transient periodic force measurement in a wide frequency domain. They are widely used in mechanics, acoustics, medicine, aerospace and nation...

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Problems solved by technology

In addition, in the small deformation of the load-bearing structure of the sensor, since the strain is usually very small, it increases the difficulty of detection, but the phenomenon of small deformation and large strain gradient is ubiquitous

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