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Device for generating a hollow cathode arc discharge plasma

A hollow cathode, arc discharge technology, applied in the direction of plasma, discharge tube, circuit, etc., can solve problems such as low carrier density

Active Publication Date: 2014-10-08
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the range of plasma activation of the vapor lies outside the electric field established between the hollow cathode and the anode, however, there is the disadvantage that only an activated range can be generated in the plasma than is possible with the range containing the hollow cathode and the anode. devices with significantly lower carrier densities
Furthermore, the range of action of radiating electrons limits the geometric extension of the plasma

Method used

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  • Device for generating a hollow cathode arc discharge plasma
  • Device for generating a hollow cathode arc discharge plasma
  • Device for generating a hollow cathode arc discharge plasma

Examples

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Embodiment Construction

[0031] exist figure 1 A device 10 according to the invention is schematically shown in . The device 10 includes two plasma-generating devices 11 and 12 , each consisting of a hollow cathode 13 , 14 and associated electrodes 15 , 16 . The two electrodes 15 , 16 are designed in the form of a ring and are arranged upstream of the outlet of the respective associated hollow cathode 13 , 14 such that the axes of extension of the hollow cathode tube and the electrode ring are identical. The arrows behind the hollow cathodes 13 , 14 indicate the flow direction in which the working gas flows through the tubes of the respective hollow cathodes 13 , 14 .

[0032] In the plasma source 11 , the hollow cathode 13 and the electrode 15 are electrically conductively connected to one another, and in the plasma source 12 the hollow cathode 14 is electrically conductively connected to the associated electrode 16 . A pulse generator 17 is electrically connected to the two hollow cathodes 15 , 16...

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PUM

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Abstract

The invention relates to a device for generating a hollow cathode arc discharge plasma, consisting of two plasma sources (11; 12), each comprising a hollow cathode (13; 14) and an electrode (15; 16) that is associated with the hollow cathode (13; 14) and has an opening extending through the electrode (15; 16), wherein the hollow cathodes (13; 14) of the two plasma sources (11; 12) are connected to a pulse generator (17) that generates a bipolar, medium frequency pulsed voltage between the two hollow cathodes (13; 14). In both plasma sources (11; 12), the hollow cathode (13; 14) is connected in an electrically conductive manner to the associated electrode (15; 16), either directly or with the intercalation of at least one component (38; 39) that delimits the current direction.

Description

technical field [0001] The present invention relates to a device for generating a dense plasma for vacuum processes by means of a hollow cathode arc discharge source pulsed with alternating polarity in reactive or non-reactive coating applications. In addition to the coating of stationary substrates, the device can in particular also enable the coating of moving web-shaped substrates. The device is suitable for use in inert and reactive gas atmospheres and can therefore also be used for surface treatment and plasma etching processes. If only the term hollow cathode is used in the subsequent description of the invention, this always means the hollow cathode of a hollow-cathode arc discharge source. The present invention thus draws clear from devices in which hollow cathode glow discharge sources are used. Background technique [0002] It is known that at 10 -2 In the low pressure range between Pa and 1 Pa, the use of hollow cathode arc discharge plasma can obtain very hig...

Claims

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Application Information

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IPC IPC(8): H01J37/32
CPCH01J2237/152H01J37/32669H01J37/32807H01J37/32596H01J2237/327H01J2237/0822H05H1/48H01J37/32568H01J37/32064H01J37/32055H05H1/481
Inventor H.莫格纳G.马陶施C.梅茨纳M.容黑内尔R.拉比茨克L.克洛泽T.维尔纳J.库布斯
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV