Electrochemical micro-nano processing equipment
A micro-nano processing and electrochemical technology, applied in gaseous chemical plating, nanotechnology, microstructure technology and other directions, can solve the problems of high cost of electrochemical micro-nano processing equipment, imperfect application of electrochemical processing technology, etc. Simple, easy to operate, easy to control effects
Active Publication Date: 2016-01-20
HARBIN INST OF TECH
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[0016] In order to solve the problems of high cost of existing electrochemical micro-nano processing equipment and imperfect application of electrochemical processing technology, the present invention further provides an electrochemical micro-nano processing equipment with low cost, good application effect and high precision
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[0022] Such as Figure 1~11As shown, the electrochemical micro-nano processing equipment of this embodiment includes a vibration isolation base 1, an X-direction linear guide rail 2, a horizontal rotation assembly 3, a horizontal adjustment component 4, a Y-direction linear guide rail 5, a Z-direction linear guide rail 6, Electrode approach assembly 7, the vibration isolation base 1 includes a table top 1-1, a support beam 1-2 and a base 1-3, the table top 1-1 is fixedly installed on the upper end surface of the base 1-3, the A support beam 1-2 is detachably installed on the table 1-1, the X-direction linear guide rail 2 is fixed and placed flat on the table top 1-1, and the support beam 1-2 is perpendicular to the X-direction linear guide rail 2 Set, the horizontal rotation assembly 3 is fixed on the X-direction linear guide rail 2, the horizontal adjustment component 4 is fixed on the horizontal rotation assembly 3, and the Y-direction linear guide rail 5 is fixed on the fro...
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Abstract
An electrochemical micro-nano processing device belongs to a nano processing device. In order to solve the problems of high cost of existing electrochemical micro-nano processing equipment and imperfect application of electrochemical processing technology. The vibration isolation base includes a table top, a bracket beam and a base. The table top is fixedly installed on the upper end of the base. The bracket beam is detachably installed on the table top. The X-direction linear guide rail is fixed and flat on the table top. Setting, the horizontal rotation assembly is fixed on the X-direction linear guide rail, the horizontal adjustment part is fixed on the horizontal rotation assembly, the Y-direction linear guide rail is fixed on the front side of the support beam, the Z-direction linear guide rail is fixed on the Y-direction linear guide rail, and the electrode approaches The components are fixed on Z-direction linear guides. The invention has the advantages of high precision, good processing effect and the like, and is used for electrochemical micro-nano processing of workpieces.
Description
technical field [0001] The invention belongs to a nano-processing device, in particular to a micro-nano processing device using an electrochemical processing method. Background technique [0002] With the rapid development of science and technology, miniaturization is the general development trend in the field of military and civilian research. For example, the development of large-scale integrated circuits (ULSI), micro-nano electromechanical systems (MEMS&NEMS), micro-total analysis systems (μ-TAS) and precision optical devices requires the size of each functional device to reach the micro-nanometer level. Modern high-tech warfare requires the miniaturization of weapons, such as miniature submarines, miniature aircraft, and miniature missiles. The components of these new weapons require their structural dimensions to reach the order of microns or even nanometers, and the processing precision to reach the order of nanometers. In the civilian field, taking computer CPU chip...
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IPC IPC(8): B81C1/00B82Y40/00
Inventor 李增强詹东平国树森闫永达胡振江赵学森
Owner HARBIN INST OF TECH