Piezoelectric actuator in d15 shearing mode and precision micropositioner

Abstract

The invention discloses a piezoelectric actuator in a d15 shearing mode and a precision micropositioner comprising the piezoelectric actuator and belongs to the technical field of precision driving. The piezoelectric actuator in the d15 shearing mode comprises a piezoelectric ceramic main body, and the piezoelectric ceramic main body comprises a substrate, a first piezoelectric ceramic cantilever beam and a second piezoelectric ceramic cantilever beam, wherein the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are located on the substrate and can generate d15 shearing mode deformation. The first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertically arranged and are positioned in the length direction of the substrate, the top end of the first piezoelectric ceramic cantilever beam and the top end of the second piezoelectric ceramic cantilever beam are connected with a first flexible inversely V-shaped frame for being connected with an active cell, and the first flexible inversely V-shaped frame converts d15 shearing mode deformation of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam into an elliptic motion track. The piezoelectric actuator in the d15 shearing mode has the advantages of being small in size, large in deformation and high in output force.

Description

Technical field [0001] The present invention relates to the technical field of precision driving, in particular to a 15 A piezoelectric driver in a shear mode and a precision micro-motion stage including the piezoelectric driver. Background technique [0002] In 1998, Japanese Kurosawa et al. proposed a high-speed, large-thrust V-shaped linear ultrasonic motor, such as figure 1 As shown, the piezoelectric driver includes two symmetrical structure of the Langewen vibrator 6, when the two Langewen vibrators 6 do telescopic movement in the same direction at the same time, a symmetrical mode is formed. At this time, at the driving end of the piezoelectric driver The vertical vibration is formed, such as figure 2 As shown; when two Ranjevin vibrators 6 do mutually opposite telescopic motions at the same time, they form an antisymmetric mode. At this time, a horizontal linear motion is formed on the driving end of the piezoelectric actuator, such as image 3 Shown. The end face motion...

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Problems solved by technology

[0004] Both of the above two schemes have the following disadvantages: (1) The piezoelectric driver uses the resonance of the two vibration modes to amplify the amplitude and obtain the locus ellipse. The frequency is very large, and it is difficult to realize; (2) The first piezoelectric driver uses d 31 mode deformation, the second piezo driver employs d 33 Mode deformation, the deformation of the two modes is small, and the output force of the piezoelectric driver is low

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