Piezoelectric actuator in d15 shearing mode and precision micropositioner

A piezoelectric driver, d15 technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc., can solve the problem of low output force of piezoelectric drivers , Piezoelectric actuator size becomes larger, the frequency of vibration is large, etc., to achieve the effect of small size, eliminate the influence of piezoelectric actuator performance, and avoid limitations

Active Publication Date: 2014-10-15
PAIHE SCI & TECH HLDG CO LTD BEIJING
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Problems solved by technology

[0004] Both of the above two schemes have the following disadvantages: (1) The piezoelectric driver uses the resonance of the two vibration modes to amplify the amplitude and obtain the locus ellipse. The frequency is very large, and it is

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  • Piezoelectric actuator in d15 shearing mode and precision micropositioner
  • Piezoelectric actuator in d15 shearing mode and precision micropositioner
  • Piezoelectric actuator in d15 shearing mode and precision micropositioner

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Embodiment Construction

[0056] In order to make the technical problems, technical solutions, and advantages to be solved by the embodiments of the present invention clearer, a detailed description will be given below with reference to the drawings and specific embodiments.

[0057] On the one hand, the present invention provides a method that uses d 15 Piezo actuators in shear mode, such as Figure 7 to Figure 15 As shown, a piezoelectric ceramic body 1 is included. The piezoelectric ceramic body 1 includes a substrate 11 and is located on the substrate 11 and can generate d 15 The first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 deformed in the shear mode, the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 are vertically arranged and arranged along the length direction of the substrate 11 Cloth; the top end of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic...

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Abstract

The invention discloses a piezoelectric actuator in a d15 shearing mode and a precision micropositioner comprising the piezoelectric actuator and belongs to the technical field of precision driving. The piezoelectric actuator in the d15 shearing mode comprises a piezoelectric ceramic main body, and the piezoelectric ceramic main body comprises a substrate, a first piezoelectric ceramic cantilever beam and a second piezoelectric ceramic cantilever beam, wherein the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are located on the substrate and can generate d15 shearing mode deformation. The first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertically arranged and are positioned in the length direction of the substrate, the top end of the first piezoelectric ceramic cantilever beam and the top end of the second piezoelectric ceramic cantilever beam are connected with a first flexible inversely V-shaped frame for being connected with an active cell, and the first flexible inversely V-shaped frame converts d15 shearing mode deformation of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam into an elliptic motion track. The piezoelectric actuator in the d15 shearing mode has the advantages of being small in size, large in deformation and high in output force.

Description

Technical field [0001] The present invention relates to the technical field of precision driving, in particular to a 15 A piezoelectric driver in a shear mode and a precision micro-motion stage including the piezoelectric driver. Background technique [0002] In 1998, Japanese Kurosawa et al. proposed a high-speed, large-thrust V-shaped linear ultrasonic motor, such as figure 1 As shown, the piezoelectric driver includes two symmetrical structure of the Langewen vibrator 6, when the two Langewen vibrators 6 do telescopic movement in the same direction at the same time, a symmetrical mode is formed. At this time, at the driving end of the piezoelectric driver The vertical vibration is formed, such as figure 2 As shown; when two Ranjevin vibrators 6 do mutually opposite telescopic motions at the same time, they form an antisymmetric mode. At this time, a horizontal linear motion is formed on the driving end of the piezoelectric actuator, such as image 3 Shown. The end face motion...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04H01L41/09
Inventor 祝聪崔宏超褚祥诚
Owner PAIHE SCI & TECH HLDG CO LTD BEIJING
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