Method for realizing variable free lighting pupil based on micro-reflector array
A micro-mirror array and micro-mirror technology, applied in the field of micro-lithography, can solve the problems affecting the uniformity of the spot and the quality of the engraving line
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[0073] Example 1:
[0074] figure 1 It is a flow chart of the method for realizing a continuously variable freely illuminated pupil based on a micro-mirror array of the present invention, which includes three processes of spot position measurement, spot position optimization, and spot position correction. The specific steps are as follows:
[0075] Step (1), use a CCD camera to measure the position parameters of the reflected light spot on the illuminated target surface when each micro-mirror unit is static;
[0076] Step (2): Bring the position parameters of the reflected light spot measured in step (1) into the grid search ant colony algorithm to optimize the rotation angle matrix of the micro-mirror array that generates the required light intensity distribution;
[0077] Step (3), using the rotation angle matrix obtained in step (2), generate the control signal of each micro-mirror to control its angle rotation, measure the light intensity distribution on the illuminated target sur...
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