Silicon substrate microphone encapsulation method

Abstract

The invention provides a silicon substrate microphone encapsulation method. The silicon substrate microphone encapsulation method comprises the following steps of providing a metal material strip; punching the metal material strip for form a tone entering hole; providing composite materials which comprise a plurality of micropores; enabling the metal material strip to be attached to the composite materials to form a combination body; performing stamping forming on the combination body to form a housing; providing a circuit board, an energy transducer and an integrated chip; enabling the energy transducer and the integrated chip to be arranged on the circuit board or the housing; enabling the circuit board to be in assembly connection with the housing to form an accommodating space. According to the silicon substrate microphone encapsulation method, the waterproof and dustproof effect can be achieved, meanwhile the energy transducer and the integrated chip which are arranged in a microphone can be effectively protected, and the high-frequency response of the microphone can be effectively inhibited, the encapsulation process is simplified, and accordingly the cost is further reduced.

Description

【Technical field】 [0001] The invention relates to a microphone, in particular to a silicon-based microphone packaging method. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality. [0003] Currently, silicon-based microphones, which are widely used and have better performance, are also called MEMS (Micro-Electro-Mechanical-System Microphone) microphones in the industry. MEMS microphone is a microphone based on MEMS technology. Simply put, a capacitor is integrated on a micro-silicon chip. It can be manu...

AI Technical Summary

Problems solved by technology

[0005] The MEMS microphone 100' of the related art relies on a layer of waterproof material 18' attached to the upper surface of the upper cover 20' for waterproof and dustproof, but this way of attachment is not firm, and the waterproof material 18' will It is easy to fall off. Moreover, the waterproof material 18' is attached to the upper surface of the upper cover 20', which will affect the effect of sound transmission and cause distortion of the frequency response of the microphone.

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