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Preparation method of magnetic sensor and magnetic sensor

A magnetic sensor, magnetic induction technology, applied in the field of electronic communication

Active Publication Date: 2016-12-28
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Obviously, the difficulty of making such a sensor mainly lies in how to accurately collect and measure the magnetic field in the Z-axis direction

Method used

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  • Preparation method of magnetic sensor and magnetic sensor
  • Preparation method of magnetic sensor and magnetic sensor
  • Preparation method of magnetic sensor and magnetic sensor

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Embodiment Construction

[0026] The manufacturing method of the magnetic sensor provided by the present invention and the specific implementation of the magnetic sensor will be described in detail below in conjunction with the accompanying drawings.

[0027] attached figure 1 Shown is a schematic diagram of the implementation steps of the specific embodiment of the method of the present invention, including: step S10, providing a substrate, the surface of the substrate has at least one boss; step S11, generating a Insulation layer; step S12, forming a Z-axis magnetic induction unit on the surface of the boss side wall and the substrate, and forming a sensing unit on the surface of the substrate, the Z-axis magnetic induction unit includes a magnetization attached to the boss side wall The main body and a lead end extending to the surface of the substrate, the Z-axis magnetic induction unit and the sensing unit contain magnetic materials; step S13, forming a continuous electrode layer on the surface of...

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Abstract

The invention provides a preparation method of a magnetic sensor and the magnetic sensor. The method includes the following steps: providing a substrate, the surface of the substrate has at least one boss; forming a Z-axis magnetic induction unit on the boss and the surface of the substrate, and forming a sensing unit on the surface of the substrate, the Z The axis magnetic induction unit includes a magnetized body and a lead-out end. The Z-axis magnetic induction unit and the sensing unit contain magnetic materials; a continuous electrode layer is formed on the surface of the substrate, and the electrode layer also covers the boss; patterned The electrode layer is used to form a working electrode on the surface of the sensing unit. The advantage of the present invention is that it can detect the magnetic field in the Z axis.

Description

technical field [0001] The invention belongs to the technical field of electronic communication and relates to a magnetic sensor, in particular to a preparation method of the magnetic sensor and the magnetic sensor. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in recent years, in addition to navigation systems, more and more smart phones and tablet computers have also begun to be equipped with electronic compass as standard, bringing users Come to great application convenience. Magnetic sensors in the prior a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/12H01L43/08G01R33/09H10N50/01H10N50/10
Inventor 杨鹤俊张挺万旭东
Owner QST CORP