Wireless monitoring system for storage cabinet inflation system

Abstract

The invention relates to a wireless monitoring system of a storage cabinet inflation system. The wireless monitoring system comprises a cabinet body, at least one inflation module, an air supply module, a discharge module, at least one flow monitoring module, a wireless receiving module and a processing module. At least one wafer or at least one carrier of a photomask is stored in the cabinet body. The inflation modules are arranged in layers in the cabinet body and are respectively provided with a base for carrying one carrier, and each base is provided with at least one inflation valve and at least one exhaust valve. The air supply module is connected with the inflation valves through an air guide pipeline. The discharge module is connected with the exhaust valves through an air guide pipeline. The flow monitoring modules are arranged on the inflation modules respectively. The wireless receiving module is arranged in the cabinet body. The processing module is connected with the wireless receiving module through a connecting line. According to the wireless monitoring system, since flow modules of the inflation modules transmit data in a wireless mode without a signal line, assembly can be facilitated; besides, due to the modular design, repair of the signal line is not needed in the overhaul process, and the maintenance and repair cost is effectively lowered.

Description

technical field [0001] The present invention relates to a wireless monitoring system, in particular to a wireless monitoring system for an inflation system of a storage cabinet. Background technique [0002] Electronic products are constantly developing towards characteristics such as thinness, lightness, high frequency, and high performance. To meet this product development direction, the core chips used in electronic products must be miniaturized and have high performance. For high performance, it is necessary to miniaturize the wire diameter of the integrated circuit on the chip. Affected by the miniaturization of integrated circuits and the cost of manufacturing, the size of wafers is getting larger and larger, but the number of chips per wafer is increasing, which makes the value of wafers continue to increase. Therefore, the wafers in the manufacturing process Any problem can be extremely costly. [0003] However, during the process of manufacturing, cleaning, handli...

AI Technical Summary

Problems solved by technology

In order to improve the cleanliness of the aforementioned sealed carrier, usually a clean inert gas (such as nitrogen (N) will be filled in the aforementioned sealed carrier. 2 )) to reduce the hazards of harmful gases; however, limited by the lack of airtightness of the carrier, it will lose its effect due to air leakage after a period of time. Develop an inflation system with recyclable injection of clean gas on the corresponding inflation seat of the furniture and its storage cabinet

[0006] However, the existing inflation system cannot be effectively monitored, so that the staff cannot effectively control its inflation rate and effect, nor can it effectively maintain the balance of its air intake and outlet, and cannot meet the needs of long-term storage

Furthermore, for the convenience of work, the existing gas charging system usually does not have a management design, resulting in continuous discharge of gas, resulting in unnecessary waste of inert gas, which not only increases the cost of materials, but also discharges a large amount of inert gas into the working environment , will also pose a threat to the health of the staff

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