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Method for preparing PDMS seal by employing hot-press approach

A technology of hot pressing and stamping, which is applied in the field of preparing PDMS stamps by hot pressing, and can solve the problems of low efficiency of PDMS stamps

Inactive Publication Date: 2015-01-14
WUXI IMPRINT NANO TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Purpose of the invention: In order to solve the problem of low efficiency in preparing PDMS stamps in the prior art, the present invention provides a method for rapidly preparing PDMS stamps

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] Inductively coupled plasma is used to etch the silicon mold, and the metal nickel template is obtained by electroforming, and then the surface of the template is cleaned according to the following method: put the template in acetone, ultrasonic for 8 minutes, then put the template in ethanol, ultrasonic for 8 minutes , and finally placed in deionized water, and ultrasonicated for 3 minutes to obtain a template. Heat the template and sheet polycarbonate polymer to 200°C, apply a pressure of 500N, and maintain it for 50s, then lower the temperature and pressure to normal temperature and pressure, and finally demould to obtain a polymer mold. Mix and stir the PDMS prepolymer and the corresponding curing agent at a volume ratio of 10:1, put it in a vacuum box for degassing for 30 minutes, pour it on the template, remove the air bubbles with a needle tip, and put it on the chassis of the plastic rejection table and suck it with vacuum The template is then rotated at 1000 rpm...

Embodiment 2

[0019] Inductively coupled plasma is used to etch the silicon mold, and the metal nickel template is obtained by electroforming, and then the surface of the template is cleaned according to the following method: put the template in acetone, ultrasonic for 5 minutes, then put the template in ethanol, and ultrasonic for 5 minutes , and finally placed in deionized water, and ultrasonicated for 2 minutes to obtain a template. The template and the sheet-like polymethyl methacrylate (PMMA) polymer were heated to 220°C, a pressure of 600N was applied and maintained for 50s, and then the temperature and pressure were lowered to normal temperature and pressure, and finally the polymer mold was demolded. Mix and stir the PDMS prepolymer and the corresponding curing agent at a volume ratio of 10:1, put it in a vacuum box for degassing for 30 minutes, pour it on the template, remove the air bubbles with a needle tip, and put it on the chassis of the plastic rejection table and suck it with...

Embodiment 3

[0023] Inductively coupled plasma is used to etch the silicon mold, and the metal nickel template is obtained by electroforming, and then the surface of the template is cleaned according to the following method: put the template in acetone, ultrasonic for 5 minutes, then put the template in ethanol, and ultrasonic for 5 minutes , and finally placed in deionized water, and ultrasonicated for 2 minutes to obtain a template. Heat the template and sheet-like polyethylene terephthalate-1,4-cyclohexanedimethanol (PETG) polymer to 200°C, apply a pressure of 500N, and maintain it for 50s, then lower the temperature and pressure to room temperature Atmospheric pressure, and finally demoulding to obtain a polymer mold. Mix and stir the PDMS prepolymer and the corresponding curing agent at a volume ratio of 10:1, put it in a vacuum box for degassing for 30 minutes, pour it on the template, remove the air bubbles with a needle tip, put it on the chassis of the plastic rejection table and ...

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Abstract

The invention discloses a method for preparing a PDMS seal by employing a hot-press approach, and belongs to the technical field of nano coining. The method comprises the following concrete operation steps: (1) processing a template and processing the template surface; (2) carrying out hot pressing on a polymer by virtue of a template to obtain a polymer mold; and (3) preparing a PDMS seal by virtue of the polymer mold. According to the method, the polymer template is firstly prepared by using the hot pressing method and is taken as an intermediate medium; a mixture of a PDMS performed polymer and a curing agent is spun or cast on a polymer wood plate; and finally the mixture is solidified and demolded. According to the method, the time for preparing the PDMS seal is shortened, and the prepared PDMS seal is high in accuracy and is suitable for being widely applied to the fields such as soft lithography and ultraviolet coining.

Description

technical field [0001] The invention belongs to the technical field of nano-imprinting, and in particular relates to a method for preparing PDMS stamps by hot-pressing. Background technique [0002] In nanoimprinting, the stamp is sometimes called a mold. The preparation of the stamp is very important, because the quality of the graphics on the stamp determines the quality of the graphics that can be transferred to the polymer by nanoimprinting. The resolution on the stamp determines the quality of the polymer. The resolution of the upper pattern. Although the existing method for preparing PDMS stamps is simple and direct, the efficiency is not high, because after the mixture of PDMS prepolymer and curing agent is cast into the template, it will always occupy the template during the curing process with the template, and the curing The time usually takes 1 to 2 hours, and in some cases, such as when used in biological reactions, the curing temperature cannot be too high, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
Inventor 万光会肖延安
Owner WUXI IMPRINT NANO TECH
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