Realization method of microminiature inertial measurement unit
A technology of inertial measurement unit and implementation method, which is applied in directions such as navigation through speed/acceleration measurement, can solve the problems of many interconnecting lines, large volume, low reliability, etc., and achieve the goal of improving reliability and reducing lever-arm effect Influencing and reducing the difficulty and complexity of assembly
Inactive Publication Date: 2015-01-28
SUZHOU R&D CENT OF NO 214 RES INST OF CHINA NORTH IND GRP
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[0011] Design a micro-miniature inertial measurement unit based on LTCC technology, overcome the shortcomings of the existing technology, solve the problems of many interconnection lines, large volume, and low reliability of the existing solutions, and meet the requirements of personal navigation and micro-miniature aircraft
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[0037] The present invention will be further described below in conjunction with the drawings. The following embodiments are only used to explain the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.
[0038] The miniature inertial measurement unit in the present invention uses three single-axis MEMS accelerometers and three single-axis MEMS gyroscopes as inertial sensors, and the signal processor uses a DSP processor chip.
[0039] The miniature inertial measurement unit in the present invention adopts the LTCC process to make the frame substrate, which is both the circuit board of the measurement unit and the supporting structure of the gyroscope and accelerometer.
[0040] The miniature inertial measurement unit of the present invention includes three LTCC substrates, which are an X-direction substrate, a Y-direction substrate and a Z-direction substrate. The X-direction inertial sensor and its pe...
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The invention discloses a realization method of a microminiature inertial measurement unit. The microminiature inertial measurement unit comprises three LTCC (Low Temperature Cofired Ceramic) frame substrates, namely an X-direction substrate, a Y-direction substrate and a Z-direction substrate, wherein the width of the Y-direction substrate is the same as that of the X-direction substrate; the length of the Y-direction substrate is the same as that of the Z-direction substrate; welding discs trending towards a width direction are arranged in a middle position of the back surface of the Y-direction substrate; welding discs welded with the X-direction substrate and the Y-direction substrate are arranged on the front surface of the Z-direction substrate; and the X-direction substrate and the Y-direction substrate which are welded together are welded on the Z-direction substrate. The substrates prepared by an LTCC technology are interconnection circuit boards of devices and mounting support boards of inertial sensors, so that the traditional metal frame is saved, and the size and the weight are reduced; signal transmission requires no interconnection wire, and assembling of the devices and mounting of a system use a reflow welding technology, so that the assembling difficulty and complexity are reduced, and the reliability of the system is improved; and chips are concentrated, so that an influence of a level arm effect is reduced.
Description
[0001] technical field [0002] The invention relates to a method for realizing a miniature inertial measurement unit, which belongs to the technical field of circuits. Background technique [0003] The inertial measurement unit is a six-degree-of-freedom inertial measurement device composed of three acceleration sensors and three angular rate sensors (gyroscopes), which can sense the angular rate of the moving body in three rotational directions and the acceleration in three linear motion directions, and then Solve the attitude angle of moving objects, widely used in aircraft, robots, industrial equipment, platform stability, ships, auxiliary GPS navigation and other fields. [0004] With the development of micro-manufacturing technology and MEMS technology, a new generation of micro-MEMS gyroscopes and MEMS accelerometers has developed rapidly, which provides strong support for the design and development of micro-miniature measurement units. The existing research on micro-...
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IPC IPC(8): G01C21/16
CPCG01C21/18
Inventor 黄艳辉董冀鞠莉娜
Owner SUZHOU R&D CENT OF NO 214 RES INST OF CHINA NORTH IND GRP