A precision macro-motion parallel positioning system and method in a micro-nano operating environment

Abstract

The invention discloses a precise micro-dynamic parallel locating system and method for micro-nano operation environment. The precise micro-dynamic parallel locating system for the micro-nano operation environment comprises a mechanical body, a calibrating device and a control device which are connected in sequence; the mechanical body comprises a pedestal, more than three groups of the same ultrasonic motor drive branched chains and a movable platform; the calibrating device is used for calibrating the actual value of a kinematics parameter, feeding back the movement position of a joint and correcting the original point of the movable platform; the control device is used for processing each module signal, processing correspondingly and driving the mechanical body to move according to a scheduled track. The precise micro-dynamic parallel locating system and method avoid the disadvantages of a traditional electromagnetic motor and reduce the influences of such nonlinear factors as friction and elastic deformation of additional mechanisms and gaps between additional mechanisms, and the precise micro-dynamic parallel locating system is gapless, high in intensity, compact in structure, capable of eliminating assembly error and size error and suitable for the micro-nano operation environment; the precise micro-dynamic parallel locating system and method for the micro-nano operation environment can achieve sub-micron locating precision and millimeter travel and can also be used for macro-micro locating tables.

Description

technical field [0001] The invention relates to the fields of precision manufacturing, precision measurement and precision positioning, and in particular to a precision macro-motion parallel positioning system and method in a micro-nano operating environment. Background technique [0002] With the development of science and technology, precision manufacturing, precision measurement and precision positioning technology occupy an increasingly important position in the frontier of scientific research and industrial production. For example, in the fields of bioengineering, precision mechanical engineering or material science, it is often necessary to use micro-nano operating systems to study samples. Micro-nano operating systems include observers, positioning platforms, and manipulators. Existing commercial observers such as scanning electron microscopes (SEMs) often use serial structures for positioning platforms, which have low precision and are prone to accumulating errors, w...

AI Technical Summary

Problems solved by technology

The disadvantage of this scheme is that the rigidity and load-bearing capacity of the mechanism are reduced, and vibration is easily generated during high-speed positioning movement

[0008] In addition, none of the mechanisms mentioned above and the literature that has been checked so far have considered eliminating the assembly error of the branch chain of the parallel mechanism

For parallel mechanisms, especially planar parallel mechanisms, the assembly error of each branch chain will cause the tilt or deformation of the moving platform, which will affect the positioning accuracy of the mechanism

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