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Method for characterizing nano-porous material

A nanoporous, characterization technology, used in image data processing, instrumentation, computing, etc.

Inactive Publication Date: 2015-02-04
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Wang Q. et al. proposed a secondary scanning moiré method in their paper Formation of secondary Moiré patterns for characterization of nanoporous alumina structures in multiple domains with different orientations in 2013, by dividing the surface of nanoporous materials into regions Analysis to achieve structural characterization, its limitation is that effective large-area characterization cannot be performed

Method used

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  • Method for characterizing nano-porous material
  • Method for characterizing nano-porous material
  • Method for characterizing nano-porous material

Examples

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Embodiment Construction

[0032] The following is an example of measuring an alumina nanoporous film sample using a FEI Quanta FEG 450 scanning electron microscope. The film structure has non-connected pores between 20 and 100 nanometers, and its microstructure is as figure 1 shown. It should be noted that although the above-mentioned scanning electron microscope is used in this embodiment, this method can also be implemented by scanning tunneling microscope (STM), atomic force microscope (AFM) or other devices that can realize microscopic scanning imaging and form moiré. accomplish.

[0033] First, the nanoporous material to be tested is processed into a rectangular film sample with a thickness of 0.2 mm and placed on the sample stage of the scanning electron microscope, and the magnification and working distance are adjusted. When the magnification is 1800 times and the working distance is At 11.6mm, moiré fringe images will be generated in the scanning electron microscope display, and the moiré fri...

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Abstract

The invention provides a method for characterizing a nano-porous material. The method is characterized in that the scanning moire method and the gray-level co-occurrence matrix processing method are combined. The method comprises the following steps: shooting cloud moire stripe images of the measured nano-porous material through an electronic scanning microscope; processing the cloud moire stripe images by the gray-level co-occurrence matrix processing method to obtain the statistics characteristics of the stripe distribution; counting the main structure cycle and main structure direction of the measured nano-porous material by the basic formula of the geometric cloud moire method based on the statistics parameters of the stripe distribution in the obtained cloud moire stripe image.

Description

technical field [0001] The invention relates to a nanoporous material characterization method, in particular to a nanoporous material characterization method combined with a scanning moiré technique and a gray scale co-occurrence matrix processing method. Background technique [0002] Nanoporous materials refer to materials with holes of arbitrary shape with diameters ranging from a few nanometers to hundreds of nanometers on the surface and inside of the material, and the holes are not connected to each other. As a new type of material, nanoporous materials have important potential applications in photoelectric conversion, chemical catalysis, and gas filtration. With the continuous maturity of micro-manufacturing technology, researchers have been able to prepare nanoporous materials with expected characteristic parameters, which provides a technical guarantee for further research on nanoporous materials. To realize the widespread application of nanoporous materials, it is ...

Claims

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Application Information

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IPC IPC(8): G06T7/00
CPCG06T7/0004G06T7/45G06T2207/10061G06T2207/30124
Inventor 谢惠民刘战伟李传崴
Owner TSINGHUA UNIV
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