Tunable narrow-linewidth DUV (Deep Ultra Violet) laser

A narrow-linewidth, deep-ultraviolet technology, applied in the field of lasers, can solve the problems of inability to promote multiple applications, complex systems, and high costs, and achieve the effects of saving synchronous control circuits, reducing costs, and increasing power

Inactive Publication Date: 2015-02-11
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] But so far, most of the pulsed narrow-linewidth tunable deep ultraviolet laser devices are complex and huge, using multiple pump laser sources, and the cost is high, and most systems are designed to operate at a single wavelength, which cannot be popularized and meet multiple applications at the same time

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  • Tunable narrow-linewidth DUV (Deep Ultra Violet) laser
  • Tunable narrow-linewidth DUV (Deep Ultra Violet) laser
  • Tunable narrow-linewidth DUV (Deep Ultra Violet) laser

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Embodiment Construction

[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0035] In order to clearly show the optical path of the laser in the embodiment of the present invention, only lines are used to indicate the optical path of the laser in the drawings, and the beam diameter of the laser is not shown.

[0036] figure 1 is a schematic structural diagram of a tunable narrow linewidth deep ultraviolet laser according to the first embodiment of the present invention. Such as figure 1 As mentioned above, it includes a pump laser 1 , a pulse-type tunable narrow-linewidth oscillator 2 , a four-way amplifier 3 , a frequency converter 77 and a beam splitter 5 . The pump laser light emitted by the pump laser 1 is expanded and collimated by the concave lens 30 and the convex lens 31, and then enters the beam spl...

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Abstract

The invention provides a tunable narrow-linewidth DUV (Deep Ultra Violet) laser, which comprises a pump laser for outputting pump laser light, a first beam splitter for dividing the pump laser light into first pump laser light and second pump laser light, a pulsed tunable narrow-linewidth oscillator comprising a first titanium sapphire crystal, a multi-pass amplifier comprising a second titanium sapphire crystal, and a frequency converter, wherein the first pump laser light enters the pulsed tunable narrow-linewidth oscillator and outputs a tunable seed laser with a wavelength of 780nm-820nm, and the tunable seed laser delays 100-150ns than the pump laser light; the second pump laser light enters the second titanium sapphire crystal, and the multi-pass amplifier is used for power-amplifying the tunable seed laser entering the multi-pass amplifier and outputting tunable fundamental frequency laser light; the frequency converter is used for quadrupling the tunable fundamental frequency laser light to obtain tunable DUV laser light with a wavelength of 195nm-205nm. The pump laser provided by the invention has a small number and a low cost, and can be used in various application occasions.

Description

technical field [0001] The invention relates to a laser, in particular to a tunable narrow-linewidth deep ultraviolet laser. Background technique [0002] Narrow linewidth lasers generally refer to lasers whose spectral linewidth is less than 1 nanometer (nm), or even to the order of picometers (pm) and femtometers (fm). With the development of laser technology, narrow-linewidth lasers have been widely used in precision spectroscopy, atmospheric optics, laser remote sensing, and laser cooling of atoms. In particular, the narrow linewidth tunable deep ultraviolet laser has become one of the indispensable and effective tools in cutting-edge basic scientific research such as plasma diagnosis, atomic solid state physics, and laser isotope separation. For example, in the laser isotope separation of some radioactive elements, the key point is to ionize the desired isotope composition from numerous isotope atomic transition lines with a deep ultraviolet laser with a spectral linew...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/094H01S3/10H01S3/11H01S3/109
Inventor 王睿滕浩李德华魏志义
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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