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Temperature compensation method of silicon piezoresistive pressure transmitter

A silicon piezoresistive, temperature-compensated technology, applied in fluid pressure measurement by changing ohmic resistance, measuring fluid pressure, instruments, etc., can solve the network instability of the neural network method, the large memory space of the look-up table method, and the long training time And other issues

Inactive Publication Date: 2015-02-25
ZHONGHUAN TIG
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The look-up table method needs to occupy a large memory space, and the neural network method has disadvantages such as network instability and long training time, so it does not take advantage of engineering applications.

Method used

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  • Temperature compensation method of silicon piezoresistive pressure transmitter
  • Temperature compensation method of silicon piezoresistive pressure transmitter
  • Temperature compensation method of silicon piezoresistive pressure transmitter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0057] Embodiment: the steps of temperature compensation method are as follows:

[0058] 1. Establish pressure and temperature compensation relational formula;

[0059] 2. Put the silicon piezoresistive pressure transmitter with a range of 63bar into the thermostat, and connect the air source to provide standard pressure for the pressure transmitter. Power up the pressure transmitter and close the thermostat. In the temperature range of the silicon pressure transmitter (-35 ° C ~ 85 ° C), a temperature point is selected every 5 ° C, and there are 25 temperature test points (m = 25). Collect the measured pressure values ​​(n=3) of the pressure transmitter at the standard pressure of 0bar, 0.5bar and 1bar at each temperature point, and obtain the following matrix:

[0060] r=m*n=25*3=75

[0061] t=[-35 -35 -35 -30 -30 -30 -25 -25 -25 -20 -20 -20 -15 -15 -15

[0062] -10 -10 -10 -5 -5 -5 0 0 0 5 5 5 10 10 10 15 15 15 20 20 20 25

[0063] 25 25 30 30 30 35 35 35 40 40 40 45 4...

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Abstract

The invention relates to a temperature compensation method of a silicon piezoresistive pressure transmitter. The method comprises the steps that firstly, a high-order temperature compensation relational expression of the pressure of the silicon piezoresistive pressure transmitter is established; afterwards, the silicon piezoresistive pressure transmitter is placed into a thermotank, m temperature points are evenly selected within the temperature range of the pressure transmitter, and pressure measurement values, within the pressure range, of the silicon piezoresistive pressure transmitter under n standard pressure are collected at all the temperature points; next, according to m temperature values, the n standard pressure and the m*n pressure measurement values, the temperature compensation coefficients of the pressure of the silicon piezoresistive pressure transmitter are obtained through calculation based on the least-squares regression algorithm, and the temperature compensation coefficients are stored in a storage unit of the pressure transmitter so that temperature compensation for the silicon piezoresistive pressure transmitter can be achieved. By the adoption of the method, the output linearity and the accuracy of the pressure transmitter can be improved, and the stability and the reliability of the pressure transmitter within the full temperature range are improved; besides, through the method, internal storage occupancy is small, and the operation speed is high.

Description

technical field [0001] The invention relates to a silicon piezoresistive pressure transmitter, in particular to a temperature compensation method for a silicon piezoresistive pressure transmitter. Background technique [0002] Silicon piezoresistive pressure transmitters are easily affected by temperature, resulting in zero point drift and sensitivity drift, and there are errors between the measured value and the real value. Therefore, temperature compensation is a key link to improve sensor performance. At present, there are mainly two temperature compensation methods for silicon piezoresistive pressure sensors: hardware compensation and software compensation. The hardware compensation method has disadvantages such as difficulty in debugging, low precision, high cost, and poor versatility, which is not conducive to practical engineering applications; software compensation can overcome the above shortcomings, and has gradually become a research hotspot. [0003] At present,...

Claims

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Application Information

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IPC IPC(8): G01L9/02G01L19/04
Inventor 孟丹丹杨彬李强皇甫晓蓉
Owner ZHONGHUAN TIG
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