Glass processing method and system

A processing method and technology of a processing system, applied in the field of glass processing, can solve the problems of low glass precision and efficiency, easy to break, etc., and achieve the effects of low cost, high precision and efficiency, and easy installation.

Inactive Publication Date: 2015-03-04
NANTONG UNIVERSITY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] The object of the present invention is to provide a processing method and processing system for glass microholes and microgrooves, so as to solve the problems of low precision and efficiency and easy damage in existing glass processing.

Method used

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  • Glass processing method and system

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Embodiment Construction

[0016] like figure 1 , a specific glass processing system implementing the method of the present invention has a tool electrode 13, the tool electrode 13 is connected to the ultrasonic vibrator 4, and is electrically connected to the negative electrode of the DC power supply 15. The tool electrode 13 will be used as a tool for processing micropores or microgrooves on the glass, and is arranged on an adjustment support 3 by the ultrasonic vibrator 4 connected thereto, so that the micropores of the glass can be adjusted by the adjustment support 3. Or during micro-groove processing, the feed movement in the depth direction can be done with the adjustment support 3 . A solution with electrochemical corrosion effect is placed in the chemical solution tank 16, and the processed glass workpiece 24 is fixed in the chemical solution tank 16 by the clamp 23 according to the upward direction of the processing surface and immersed in the chemical solution. The connected additional elect...

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Abstract

The invention relates to a glass processing method and a glass processing system. According to the method, a glass workpiece is soaked into a chemical solution so as to be positively charged, a tool electrode is negatively charged, rotatably moves, ultrasonically vibrates and acts on the glass workpiece, the chemical solution becomes a discharge channel between a positive electrode and a negative electrode, and hydraulic impact waves generated by the thermodynamic effect and the ultrasonic vibration of a discharge moment and electrochemical anodic dissolution co-act on the action part of the tool electrode to form a processing surface. The glass processing system comprises a direct current power supply, the tool electrode which is connected with the negative electrode of the direct current power supply, an ultrasonic vibrator which is connected with the tool electrode, an adjusting supporting seat which drives the ultrasonic vibrator to move up and down, an additional electrode which is connected with the positive electrode of the direct current power supply and positively charges the glass workpiece, and a chemical solution tank which is used for holding the glass workpiece. The glass processing method and the glass processing system have the advantages that higher-accuracy and higher-efficiency glass micro-pore groove processing can be realized; meanwhile, an implementation method is low in cost, and an implementation system is simple in structure and is easy to mount and maintain.

Description

[0001] technical field [0002] The invention relates to glass processing, in particular to a glass processing method and a processing system implemented by using electric spark discharge, electrochemical corrosion and ultrasonic vibration to act on the glass together. Background technique [0003] With the development and application of microelectromechanical systems, glass processing has become one of the important technologies in the preparation of microsensors. [0004] At present, the methods for processing micropores and microgrooves on glass mainly include chemical etching, mechanical grinding and other methods. Chemical etching generally needs to cooperate with the mask photolithography process. It is difficult to control the processing accuracy during the processing, and it is easy to damage the flatness of the glass surface. The taper of the processed micro-holes and micro-grooves is obvious. The mechanical grinding method is to cover the glass with emery, and us...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23H5/02B23H7/38B23H7/30
CPCB23H5/02B23H7/30B23H7/38
Inventor 张华钱双庆华亮
Owner NANTONG UNIVERSITY
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