Graphene oxide based capacitive temperature sensor and production method thereof

A temperature sensor, capacitive technology, applied to thermometers, thermometers, instruments, etc. that use electric/magnetic elements that are directly sensitive to heat, can solve the problems of complex manufacturing process of temperature sensors, cross-sensitivity of temperature and humidity, etc., to avoid temperature Humidity cross-sensitivity, high sensitivity, simple process effect

Inactive Publication Date: 2015-03-04
SOUTHEAST UNIV
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Problems solved by technology

The manufacturing process of this capacitive temperature sensor is complicated, and the temperature and humidity are cross-sensitive, so the application has limitations

Method used

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  • Graphene oxide based capacitive temperature sensor and production method thereof

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the accompanying drawings.

[0018] Such as figure 1 Shown is a capacitive temperature sensor based on graphene oxide, including a substrate 1, a lower electrode, an insulating layer 4, a graphene oxide layer 5 and a graphene layer 6 arranged in sequence from bottom to top, wherein the lower electrode is divided into different parts. The two parts in contact are respectively called the left lower electrode 2 and the right lower electrode 3; the left lower electrode 2, the insulating layer 4, the graphene oxide layer 5 and the graphene layer 6 form a left plate capacitor structure, The right bottom electrode 3 and the insulating layer 4, the graphene oxide layer 5 and the graphene layer 6 form a right plate capacitor structure, and the left plate capacitor structure and the right plate capacitor structure are connected in series for output.

[0019] The graphene layer 6 is obtained by chemically r...

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Abstract

The invention discloses a graphene oxide based capacitive temperature sensor and a production method thereof. The capacitive temperature sensor comprises a substrate, lower electrodes, an insulation layer, a graphene oxide layer and a graphene layer from the bottom to the top successively. The lower electrodes are divided into two parts which are not in contact, that is, a left lower electrode and a right lower electrode. The left lower electrode and the insulation layer, the graphene oxide layer and the graphene layer form a left plate capacitor structure. The right lower electrode and the insulation layer, the graphene oxide layer and the graphene layer form a right plate capacitor structure. The left plate capacitor structure and the right plate capacitor structure are connected in series to be output. According to the temperature sensor and the production method thereof, a sandwich structure is used as the sensitive capacitor, so that the sensor sensitivity is high; the electrodes on the sensitive capacitor are formed by the graphene oxide layer, and accordingly, during electric conduction, moisture is separated, and temperature and humidity cross sensitivity is prevented; the graphene oxide layer is produced through chemical reduction of the graphene oxide upper surface, therefore, the process is simple.

Description

technical field [0001] The invention relates to a capacitive temperature sensor based on graphene oxide and a preparation method thereof, belonging to micro-electromechanical technology. Background technique [0002] Temperature sensors are widely used in many fields such as industry, agriculture, meteorology, transportation, and household appliances. Compared with resistive temperature sensors, capacitive temperature sensors have high sensitivity and low power consumption. [0003] The temperature change can be converted into capacitance change by using the characteristic that the dielectric constant of the sensitive material changes with temperature. In 1996, Vaisala (company name) in the Netherlands proposed a capacitive temperature sensor structure based on temperature-sensitive ceramics. In 2009, D.W.Lee (name) and others proposed that the dielectric constant of graphene oxide varies with temperature; therefore, graphene oxide can be used as a sensitive material for c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/34
Inventor 黄见秋陈文浩
Owner SOUTHEAST UNIV
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