Tubular diffusion furnace temperature area automatic calibration technology based on PID self-setting

Abstract

The invention discloses a tubular diffusion furnace temperature area automatic calibration technology based on PID self-setting. Temperature in a tubular diffusion furnace is automatically calibrated by utilizing a PID technology according to temperature detected by a side thermocouple and a temperature control thermocouple in the furnace body so that diffusion technology temperature stabilization and temperature difference automatic compensation can be realized. The concrete process of the tubular diffusion furnace temperature area automatic calibration technology comprises the following steps of (1) a stabilization stage of temperature T1; (2) and a temperature difference automatic compensation stage of temperature T1, wherein the stabilization stage of temperature T1 is arranged at constant temperature, the relation between temperature T1 and diffusion temperature T0 is T1=T0, and T0 is target temperature required by the diffusion technology. Automatic calibration of temperature of the temperature area is realized in an automatic operation technology, and calibration of multiple temperature areas can be realized in the same technology operation so that manual operation is substituted, the operation process is simplified, equipment and technology reliability is enhanced and production efficiency is enhanced.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a process for automatically calibrating the temperature zone of a tubular diffusion furnace based on PID self-tuning. Background technique [0002] In the production of crystalline silicon solar cells, the stability and accuracy of the temperature in the constant temperature zone of the diffusion furnace directly affects the quality of the P-N junction and determines the performance of the solar cell. The diffusion process has very strict requirements on the diffusion temperature. Generally, the diffusion is carried out at a given temperature in the range of 850-1250°C, and the temperature drift shall not exceed ±1°C, and the smaller the temperature drift, the better. Therefore, in the high-temperature diffusion process, the control of the furnace temperature is crucial. In order to ensure the controllability and stability of the temperature of the diffusion furn...

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Problems solved by technology

[0005] In the current diffusion furnace, the temperature control and adjustment system is generally equipped with PID, but how to combine the temperature control and adjustment system with the process parameters manually set during the calibration of the current diffusion furnace temperature zone, and how to combine the temperature in the diffusion process The key steps of control, setting one or several temperatures that require precise temperature control, and realizing temperature zone calibration in the automatic operation process are the future development directions to ensure the controllability and stability of the diffusion furnace temperature

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