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Deposition source conveying device

A technology for transporting devices and deposition sources, which is applied in the field of deposition source transporting devices in ion implantation systems, can solve problems such as productivity reduction, chamber pollution, ion implantation system noise, etc., and achieve the effect of reducing pollution

Active Publication Date: 2018-08-10
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] This vibration introduces noise into the ion implantation system, which can cause problems such as sensor errors and non-uniform film thickness
In particular, in the case of large friction, the moving speed decreases, which induces the unevenness of the film thickness
In addition, when the balls generate heat due to friction or the lubricating oil is heated due to the heat in the chamber, the gas will cause contamination of the chamber due to the evaporation of the lubricating oil, which will cause defects.
In addition, since the operation needs to be interrupted for the resupply of lubricating oil, there is a problem that the operation time is delayed and the productivity decreases

Method used

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Embodiment Construction

[0039] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art of the present invention can easily implement them. The present invention can be realized in many different forms and is not limited to the embodiments described here.

[0040] Throughout the specification, when it is mentioned that a certain part "includes" a certain structural component, unless there is a contrary statement, it means that other structural components are not excluded, but may further include other structural components. In addition, in this description, "on" means being located on the upper side or the lower side of a target member, and does not necessarily mean being located on the upper side with respect to the direction of gravity.

[0041] figure 1 is a perspective view illustrating a deposition source conveying device according to an embodiment of the present invention, figure 2 is along fi...

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Abstract

A deposition source conveying device according to an aspect of the present invention includes: a guide rail formed extending in one direction and having a first levitation member forming a magnetic force; a supporting member arranged on the guide rail and having a the second suspension part opposite to the suspension part; and the deposition source frame, installed on the support part.

Description

technical field [0001] The present invention relates to a deposition source conveying device, and in more detail, relates to a deposition source conveying device suitable for an ion implantation system. Background technique [0002] Generally speaking, an electroluminescent display device as one of flat panel displays is divided into an inorganic electroluminescent display device and an organic electroluminescent display device according to the material used as a light-emitting layer. Since the organic electroluminescent display device can use low voltage It is not only lightweight and thin, but also has the advantages of wide viewing angle and fast response speed, so it is attracting attention. [0003] The organic electroluminescent element of this organic electroluminescent display device is composed of an anode, an organic material layer and a cathode formed in a laminated manner on a substrate. The organic material layer includes the organic material layer of the organ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/48
CPCC23C14/48H05B33/10H01L21/67706C23C14/12C23C14/24H10K71/191H10K71/164H10K71/811H10K71/00
Inventor 高晟洙朴旻亨金在福宋原准李宽熙
Owner SAMSUNG DISPLAY CO LTD