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Single-slit spatial carrier shearing speckle interferometry measuring system and measuring method

A technology of speckle interference and measurement system, which is applied in the field of machinery manufacturing and aerospace, and can solve the problems of inability to realize dynamic measurement and small measurement range

Active Publication Date: 2015-04-01
HEFEI UNIV OF TECH
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Problems solved by technology

[0003] However, the measurement range of traditional shearing speckle interferometry is small, and time phase shift technology is often used. Time phase shift technology refers to collecting images in time series and forming a fixed phase difference between each frame of images, but this method is easy Affected by the external environment, such as vibration, temperature fluctuation, or the rapid movement of the measured object itself, dynamic measurement cannot be realized

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  • Single-slit spatial carrier shearing speckle interferometry measuring system and measuring method

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Embodiment Construction

[0051] see figure 1 , the composition of the single-slit space carrier shearing speckle interferometry system in this embodiment is as follows: the laser light emitted by the laser 1 passes through the beam expander 2 and irradiates the measured object 3 in the form of diffused light, and the surface of the measured object 3 diffuses The reflected light sequentially passes through the imaging lens 4 , the slit diaphragm 5 , the 4f system 6 and the Michelson device 7 and is projected onto the target surface of the CCD camera 8 .

[0052] like figure 1 As shown, the Michelson type device 7 is made of a dichroic prism, a first plane mirror at the first side of the dichroic prism, and a second plane mirror at the second side of the dichroic prism, the first side of the dichroic prism and the second side of the dichroic prism are two adjacent sides of the dichroic prism, the first plane mirror forms a non-zero included angle θ with the first side of the dichroic prism, and the sec...

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Abstract

The invention discloses a single-slit spatial carrier shearing speckle interferometry measuring system and a measuring method. The measuring system and the measuring method are characterized in that laser shot by a laser device passes through a beam expander and then irradiate a measured object in the form of diffusion light, diffuse reflection light on the surface of the measured object sequentially passes through an imaging lens, a slit diaphragm, a 4f system and a Michelson type device to be projected onto a target surface of an CCD camera. The measuring system and the measuring method can carry out nondestructive, full-field, rapid and dynamic measurement for the defects and stress deformation of the surface of the measured object and is convenient for field measurement.

Description

technical field [0001] The invention relates to a single-slit space carrier shear speckle interferometry system and measurement method, which are used to solve the problem of non-destructive, fast, dynamic and online detection of deformation and defects of large-area measured objects in industry, and can be widely used It is widely used in aerospace, machinery manufacturing and other fields. Background technique [0002] With the continuous development of modern industrial technology, people's requirements for the detection technology of production equipment and products are also constantly improving. High precision, non-contact, on-line detection, etc. have become the development trend of industrial detection technology. Shear speckle interferometry is an important branch of laser measurement. In addition to the above advantages, it also has the advantages of non-destructive, full-field detection, strong shock resistance, and no need for reference beams. Therefore, shear s...

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Application Information

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IPC IPC(8): G01B11/16G01B11/02G01N21/88
Inventor 王永红冯家亚王鑫刘莹雪杨连祥
Owner HEFEI UNIV OF TECH
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