Dynamic characteristic self-adapting matching micro structure array precise processing machine tool

Abstract

The invention provides a dynamic characteristic self-adapting matching micro structure array precise processing machine tool, which comprises a Y-direction moving mechanism, an X-direction moving mechanism and a Z-direction precise punching mechanism, wherein the X-direction moving mechanism is fixedly arranged on a base through an X-direction support frame, the Z-direction precise punching mechanism is arranged X-direction guide rails of the X-direction moving mechanism through an X-Z linkage platform and an X-Z composite guide rail slide block, and realizes the X-direction movement under the X-direction driving by the X-direction moving mechanism, and a workpiece is placed on a Y-direction moving platform of the Y-direction moving mechanism and realizes the Y-direction movement through the Y-direction moving mechanism. The Z-direction precise punching mechanism can realize the fine regulation on dynamic characteristics according to different punching frequencies, the consistent dynamic response performance is obtained, in addition, the position force switching composite control can be realized, and the consistency processing of the micro structure array is realized. The invention provides a precise micro punching machine tool with the advantages that the aligning time is shortened, the moving deviation is reduced, and the processing efficiency and the processing precision are improved.

Description

technical field [0001] The invention relates to a precision motion platform, in particular to a microstructure array precision machining machine tool with adaptive matching of dynamic characteristics. Background technique [0002] In the field of semiconductor packaging, it is often necessary to process and manufacture some precise microstructures on the workpiece. Precision stamping machine tool is a kind of processing equipment that completes the above process. The problems existing in the current stamping equipment are: (1) the stamping precision of the stamping machine is limited; (2) the processing efficiency of the stamping machine is not high; (3) the process adjustment of the stamping equipment is relatively complicated. In the micro stamping machine tools of the prior art, a Z-direction precision stamping mechanism is set on the conventional XY platform, and piezoelectric ceramic drivers and elastic devices are used in the Z-direction precision stamping mechanism t...

AI Technical Summary

Problems solved by technology

The problems existing in the current stamping equipment are: (1) the stamping precision of the stamping machine is limited; (2) the processing efficiency of the stamping machine is not high; (3) the process adjustment of the stamping equipment is relatively complicated

Because the existing technical solution is to add a Z-direction precision stamping mechanism on the conventional XY platform, the overall structure is relatively cumbersome

In addition, the position control system is adopted for the Z-direction movement in the existing technical scheme, and the stamping force changes greatly during the contact stamping stroke of the stamping head with the workpiece, and the displacement control method will lead to limited actual stamping accuracy

However, in order to achieve high stamping precision, the existing technical solutions often require a more complex process adjustment process, and usually sacrifice processing efficiency

Images