A kind of stable doping method of graphene film
A graphene film and graphene technology are applied in the field of graphene film processing and stable doping of graphene films, which can solve problems such as disappearance, affecting the stability of square resistance, and reducing doping effect, so as to improve stability and improve Time stability, the effect of improving quality
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Embodiment 1
[0042] like figure 1 The graphene stable doping structure of the shown dopant between the substrate and graphene, the process is as follows Figure 8 As shown, the specific steps are as follows:
[0043] 1.1) Graphene is grown on copper foil by CVD method, obtains graphene / copper foil sample;
[0044] 1.2) Doping on the graphene surface to obtain a doped sample, then bonding the doped sample to the substrate, and finally putting it into an etching solution to etch the copper foil to obtain graphite The sample sheet with dopant on the ene surface is finally obtained in the form of substrate, dopant, and graphene in sequence from bottom to top.
Embodiment 2
[0046] like figure 2 The stable doping structure of the shown dopant between the graphene and the graphene layer, the process is as follows Figure 9 As shown, the specific steps are as follows:
[0047] Step 1) Graphene is grown on the copper foil by CVD, and then the temporary substrate is pasted on the graphene;
[0048] Step 2) Put the copper foil into an etching solution, etch the copper foil, wash and dry it with water, and obtain a temporary substrate / graphene layer sample, and connect the graphene side of the sample to the substrate Bonding, and then remove the temporary substrate, then put the graphene surface into the doping solution for doping, after washing and drying, a sample with dopant on the graphene surface is obtained;
[0049]Step 3) the sample sheet that is provided with dopant on the graphene surface is attached to another temporary substrate / graphene layer sample sheet, and then removes the temporary substrate to obtain substrate, graphite from bottom...
Embodiment 3
[0051] like image 3 The double-layer stable doping structure of the shown dopant between the substrate and graphene, graphene and graphene, the process is as follows Figure 8 , Figure 9 As shown, the specific steps are as follows:
[0052] The step of wrapping dopant reagent molecules between graphene and graphene is specifically as follows:
[0053] Step 1) Graphene is grown on the copper foil by CVD, and then the temporary substrate is pasted on the graphene;
[0054] Step 2) Put the copper foil into an etching solution, etch, wash and dry the copper foil to obtain a temporary substrate / graphene layer sample, and connect the graphene side of the sample to the substrate Bonding, and then remove the temporary substrate, then put the graphene surface into the doping solution for doping, after washing and drying, a sample with dopant on the graphene surface is obtained;
[0055] Step 3) the sample sheet that is provided with dopant on the graphene surface is pasted on the...
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