Unlock instant, AI-driven research and patent intelligence for your innovation.

Novel device and method for reducing energy consumption of electron beam melting technology

A technology of electron beam smelting and technology, which is applied in the field of metallurgy, can solve problems such as high cost, energy loss, and impurity pollution, and achieve the effects of preventing pollution and reducing energy loss

Inactive Publication Date: 2015-04-22
DALIAN UNIV OF TECH
View PDF10 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, at present, water-cooled copper is directly used as a melting crucible, and the cooling circulating water introduced into the crucible will take away a large amount of heat, resulting in serious energy loss, high energy consumption, and high cost, and the water-cooled copper melting crucible is directly in contact with the melt. It is easy to cause impurities to contaminate again, which reduces the purity of silicon melt

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Novel device and method for reducing energy consumption of electron beam melting technology
  • Novel device and method for reducing energy consumption of electron beam melting technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 1 As shown, a new device for reducing energy consumption of the electron beam melting technology includes a water-cooled melting crucible, and a 5mm silicon carbide substrate 2 is provided at the bottom of the inner wall of the water-cooled melting crucible.

[0032] A novel method for reducing energy consumption of electron beam smelting technology, characterized in that it comprises the following steps:

[0033] a. Remove the water vapor from the silicon carbide substrate 2; place the silicon carbide substrate in a vacuum heating furnace under the conditions of a vacuum degree of 0.01Pa, a heating temperature of 150°C, and a holding time of 3 hours; put the silicon carbide substrate into a water-cooled on the smelting crucible;

[0034] b. Load the polysilicon material to be processed on the silicon carbide substrate, and add the polysilicon material to the electron beam feeding device;

[0035] c. Preheat the electron gun; close the door of the elec...

Embodiment 2

[0040] Such as figure 2 As shown, a new device for reducing energy consumption of electron beam smelting technology includes a water-cooled melting crucible, the bottom and sides of the inner wall of the water-cooled melting crucible are sequentially provided with a 40mm silicon carbide substrate 2 and a 30mm graphite substrate from top to bottom 3.

[0041] A novel method for reducing energy consumption of electron beam smelting technology, characterized in that it comprises the following steps:

[0042] a. Remove the water vapor from the graphite substrate 3 and the silicon carbide substrate 2; place the graphite substrate in a vacuum heating furnace, the heating conditions are: vacuum degree 0.008Pa, heating temperature 400°C, holding time 2 hours, the silicon carbide substrate The bottom is placed in a vacuum heating furnace, the heating conditions are vacuum degree of 0.008Pa, heating temperature of 300°C, and holding time of 1 hour; the graphite substrate is placed on t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a novel device and method for reducing the energy consumption of an electron beam melting technology, and belongs to the field of metallurgy. The device comprises a water-cooling melting crucible, wherein a silicon carbide substrate of 5-40mm and a graphite substrate of 0-30mm are sequentially arranged at the bottom of the inner wall of the water-cooling melting crucible from top to bottom. The heat conductivities of silicon carbide and graphite are far smaller than that of a copper material, so that the heat flux when passing through the substrates is reduced, consumption of massive energy is reduced, and the energy-saving effect is exerted.

Description

technical field [0001] The invention relates to a novel device and method for reducing energy consumption of electron beam smelting technology, belonging to the field of metallurgy. Background technique [0002] Electron beam smelting technology for removing volatile impurities in polysilicon, refractory metals and rare metals is relatively mature at present. The high energy density, high melting temperature and local overheating characteristics of electron beams can effectively remove volatile impurities in raw materials. Impurities. The general process of electron beam smelting is to use water-cooled copper as a melting crucible, and the electron beam acts on the material in the melting crucible to melt it, and finally solidifies into an ingot in the crucible as a product. [0003] However, at present, water-cooled copper is directly used as a melting crucible, and the cooling circulating water introduced into the crucible will take away a large amount of heat, resulting ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037
Inventor 谭毅王登科李鹏廷石爽姜大川
Owner DALIAN UNIV OF TECH