A broadband thz wave plate composed of electromagnetic specific surface
A special surface and wave plate technology, applied to electrical components, antennas, polarizing components, etc., can solve problems such as difficult to achieve refractive index
Active Publication Date: 2017-11-17
FUDAN UNIV
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In addition, because the traditional plan regulation is realized by regulating the propagation phase inside the medium, for different frequencies, for natural materials, it is difficult to match the difference of the refractive index and the frequency change exactly, so generally speaking, the traditional wave Chips are generally single-band or narrow-band
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[0024] For the ultra-broadband THz wave plate, it is divided into two parts: the preparation process and the measurement process.
[0025] 1. Preparation of ultra-broadband THz wave plate:
[0026] According to the parameters about the whole system optimized by numerical simulation, the designed samples are prepared by using micro-nano processing technology. The main preparation steps include:
[0027] (1) Clean the silicon wafer, and evaporate 50nm gold on it by electron beam evaporation.
[0028] (2) Slice the silicon wafer with the evaporated gold layer into a size of about 1.2cm*1.2cm, paste a layer of tape (polyimide resin film) on it, the thickness is about 60um, and the dielectric parameter of the dielectric layer is about ε =3.1+0.04i.
[0029] (3) Apply LOR (polybutylene oxime) at 4000rpm, dry at 180° for about 3 minutes, apply photoresist AZ5214 at 5000 rpm, and dry at 95° for 90s.
[0030] (4) Use UPG501 plate making machine to directly write the designed struct...
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The invention belongs to the technical field of electromagnetic wave polarization regulation, and specifically relates to a broadband THz wave plate composed of an electromagnetic specific surface. The whole wave plate is fabricated on a silicon wafer substrate, consisting of a bottom backscattering metal layer, a dielectric layer, and a surface anisotropic specific dielectric layer. The present invention is a reflective ultra-broadband terahertz wave plate made on the basis of "special medium" and "electromagnetic specific surface", and its working frequency is 0.45THz to 1.15THz. For a plane linearly polarized electromagnetic wave incident at a specific polarization angle φ in the frequency range, its reflected wave can produce a 90-degree polarization deflection with an efficiency of more than 95%, and the overall energy loss is small (less than 10%); in addition, for oblique For different incident angles of θ (below 50°), the effect is slightly reduced, but it can still achieve ultra-high polarization deflection efficiency in a wide frequency range. Users can make corresponding structural wave plates according to their own needs. In addition, the operating frequency of the wave plate can be changed by scaling the structural size proportionally.
Description
technical field [0001] The invention belongs to the technical field of electromagnetic wave polarization regulation, and in particular relates to a reflective ultra-broadband terahertz wave plate. Background technique [0002] The development of information technology has made human beings more and more widely used in the regulation of information carriers (electromagnetic waves). For many new applications of electromagnetic waves, such as subwavelength imaging, negative refraction, total absorption, and field enhancement, traditional materials are increasingly difficult to meet the requirements. For this reason, scientists have begun to construct a new type of artificial composite structure and composite medium, which we call "electromagnetic metamaterials", which have extraordinary physical properties that natural media do not have, and can be easily modulated artificially. And what is used in the present invention is exactly such "electromagnetic meta-medium". Simply pu...
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IPC IPC(8): H01Q15/00G02B5/30
Inventor 马少杰罗伟杰何琼孙树林周磊
Owner FUDAN UNIV