Five-dimensional fine-tuning mechanism
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 上海光鸢光电科技有限公司
- Publication Date
- 2015-04-29
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the technical field of precision machinery, and more specifically, the invention relates to a five-dimensional fine-tuning mechanism. Background technique
[0002] In the field of precision machinery manufacturing, such as optical components (lenses and wafers) and non-standard parts shape processing, the positioning requirements are very precise, and various adjustment mounts are required, and the adjustment dimension is required to reach more than three dimensions. In the existing technology, the internal structure of a single translation stage is mainly composed of linear guide rails, ball screws, couplings, and transmission motors. The working principle of the translation platform is that the transmission motor drives the ball screw to push and pull the linear guide rail of the slide table to provide the motion trajectory. . Its disadvantages: it takes up a lot of space, and it cannot reduce its own volume in the existing ...