Helium mass spectrometer leak detection method for sealing workpiece

Abstract

The invention discloses a helium mass spectrometer leak detection method for a sealing workpiece. The method includes the steps that a first vacuum box is provided, and the sealing workpiece is placed in the first vacuum box; helium is injected into the first vacuum box, and sealing pressure maintaining is performed on the box; the sealing workpiece to be detected is taken out of the first vacuum box; a second vacuum box is provided, and the sealing workpiece taken out is placed in the second vacuum box; the second vacuum box is vacuumized, and vacuum pressure maintaining is performed on the second vacuum box; helium mass spectrometer leak detection is performed on gas inside the second vacuum box. A helium molecule pressing-in and pumping-out detection method is adopted, the method has the advantages of being high detection flexibility and detection accuracy, and the needed helium-containing pressure value is set according to pressure-resistance requirements of a to-be-detected closed container; the higher the pressure is, the higher the leak detection efficiency is; accordingly, the leakage amount of the to-be-detected closed container can be truly reflected, and special tools and fixtures are not needed; multiple workpieces can be detected at the same time to improve production efficiency, and the method can be widely applied to the temperature control pinger industry and the like.

Description

technical field [0001] The invention relates to the technical field of helium gas leak detection, in particular to a helium mass spectrometer leak detection method for a sealed workpiece. Background technique [0002] For the leak detection of completely closed containers, for example, there is no better method for the leak detection of "temperature control transmitter". Sealing and welding to form a completely closed container. The original testing process is to heat the "temperature control transmitter" of the tested part first, then put the heated "temperature control transmitter" into clean water, and observe it with human eyes after it is still. Whether the "temperature control transmitter" under test has bubbles or not, the leakage is judged based on the form and size of the bubbles based on experience, but the detection accuracy of this leak detection method is low. Contents of the invention [0003] The technical problem to be solved by the invention is to provide...

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Problems solved by technology

[0002] For the leak detection of completely closed containers, for example, there is no better method for the leak detection of "temperature control transmitter". Sealing and welding to form a completely closed container. The original testing process is to heat the "temperature control transmitter" of the test piece first, then put th

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