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Nanoparticle detection system and screening analysis method

A nanoparticle, detection system technology, applied in particle and sedimentation analysis, particle size analysis, measuring devices, etc., can solve the problems of inability to obtain, quantify, and high cost

Active Publication Date: 2015-04-29
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These tools are expensive, take a long time to prepare samples, require experienced operators, etc.
Furthermore, during sample preparation (gilding, staining, drying, freezing, etc.), there is a risk of damage to the sample such that the true characteristics of the (nano)particles cannot be obtained
[0003] In addition, for mixtures of various nanoparticles, there is currently no technology that can well quantify each type of nanoparticle, its proportion, or even the properties of the nanoparticles

Method used

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  • Nanoparticle detection system and screening analysis method
  • Nanoparticle detection system and screening analysis method

Examples

Experimental program
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Embodiment 1

[0044] According to attached figure 1 Shown is the screening layer 100 of this embodiment, and the screening layer 100 includes a substrate 101, and the upper and lower surfaces of the substrate 101 are provided with electrically insulating thin film layers 102, 103. An array of screening channels is provided on the screening layer 100 , and the minimum diameter of each screening channel in the array is different. The screening channels 111 , 112 , 113 extend from the first surface to the second surface of the substrate 101 and thus penetrate the substrate 101 . Openings corresponding to these through holes are formed on the electrical insulating films 102 and 103 . exist figure 1 In the example of , these screening channels 111, 112, 113 are shown as shapes that gradually increase from top to bottom. Such through holes can be obtained by etching the substrate with the open electrical insulating film as a mask, as follows.

[0045] According to attached Figure 2a As show...

Embodiment 2

[0073] Referring to Embodiment 1, this embodiment adopts a structure in which the screening channel extends along the substrate plane, and the others are the same as Embodiment 1.

[0074]The screening channel extends along the plane of the substrate, thus taking the form of a trench on the substrate. Particle screening channels can communicate with other channels that guide ions. For example, particles may be directed from an entry channel to a particle screening channel, through the particle aperture through the particle screening channel, and then directed to exit the channel.

[0075] Figure 5 is a cross-sectional view schematically showing a particle screening channel array formed on a substrate according to another embodiment of the present disclosure.

[0076] Such as Figure 5 As shown, the array of particle screening channels includes a substrate 500, such as a silicon wafer. On the substrate 500, one or more (two are shown in the figure) particle screening chann...

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Abstract

The invention provides a nanoparticle detection system which comprises a screening layer and a detection device, wherein a screening channel is formed in the screening layer; the nanoparticles move from one side to the other side of the screening channel, and the particles passing through the screening channel are detected by the detection device; multiple screening channels are formed in the screening layer so as to form a channel array; the smallest caliber of each screening channel is set to be a, screening channels of different values a are formed in the screening layer, and particles of which the nanoparticle size is smaller than the corresponding value a can pass through the screening channels. When nanoparticles of different sizes are mixed together, the particles can optionally pass through the screening channels of proper sizes according to the sizes of the particles, and the particles can be screened.

Description

technical field [0001] The invention relates to a detection system and a screening analysis method of nanoparticles. Background technique [0002] Nanoparticles have been widely used in various industries, such as electronics, medicine, chemical industry, food, etc. Here, nanoparticles may refer to particles smaller than 100 nanometers in at least one dimension. To study the properties, classification, toxicity, etc. of (nano)particles, commonly used tools include Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Dynamic Light Scattering Technique (DLS), etc. These tools are expensive, take a long time to prepare samples, and require experienced operators. Furthermore, during sample preparation (gilding, staining, drying, freezing, etc.), there is a risk of damage to the sample such that the true characteristics of the (nano)particles cannot be obtained. [0003] In addition, for a mixture of various nanoparticles, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/02
Inventor 王德强黄成军罗军赵超杜春雷石彪
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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