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Magnetoresistive element, magnetic sensor device, and method for manufacturing magnetoresistive element

A technology of a magnetoresistive element and a manufacturing method, which is applied in the manufacture/processing of electromagnetic devices, and a resistor for magnetic field control, etc., can solve the problem that the magnetoresistive film cannot be sufficiently prevented from being oxidized.

Active Publication Date: 2018-01-09
SANKYO SEIKI MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, even with the above methods, it is not possible to sufficiently prevent oxidation of the surface of the magnetoresistive film.

Method used

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  • Magnetoresistive element, magnetic sensor device, and method for manufacturing magnetoresistive element
  • Magnetoresistive element, magnetic sensor device, and method for manufacturing magnetoresistive element
  • Magnetoresistive element, magnetic sensor device, and method for manufacturing magnetoresistive element

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Embodiment Construction

[0044] Hereinafter, embodiments of a magnetoresistive element, a magnetic sensor device, and a rotary encoder to which the present invention is applied will be described with reference to the drawings. In addition, in the rotary encoder, when detecting the rotation of the rotor relative to the stator, a structure in which a magnet is provided in the stator and a reluctance element in the rotor, and a structure in which a reluctance element is provided in the stator and a magnet in the rotor can be employed. In any configuration, in the following description, a configuration in which a magnetic sensor device is provided in a stator and a magnet is provided in a rotor will be mainly described.

[0045] (Structure of Magnetic Sensor Device)

[0046] figure 1 It is an explanatory diagram showing the principle of the magnetic sensor device 10 having the magnetoresistive element 4 to which the present invention is applied, and the rotary encoder 1, figure 1 (a) is an explanatory d...

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Abstract

The present invention provides a magnetoresistive element, a magnetic sensor device having the magnetoresistive element, and a method of manufacturing the magnetoresistive element, the magnetoresistive element being prevented from oxidizing on the surface of the magnetoresistive film by a barrier layer The resistance change rate caused by the resistance effect is also higher. In the magnetoresistive element (4), a temperature monitoring resistive film (47) and a heating resistive film (48) made of titanium, aluminum, etc. are formed on the substrate (40) on which the magnetoresistive film (41-44) is formed. ). In addition, a barrier layer (71-74) made of titanium, aluminum, etc. is laminated on the surface opposite to the substrate (40) with respect to the magnetoresistive film (41-44), and a film of the barrier layer (71-74) The thickness is thinner than that of the magnetoresistive film (41-44). In the magnetoresistive element (4) of the structure, after the magnetoresistive film is formed, a barrier layer is laminated on the surface of the magnetoresistive film without contacting the magnetoresistive film with an oxidizing atmosphere, and then the magnetoresistive film and the barrier layer are patterned .

Description

technical field [0001] The present invention relates to a magnetoresistive element having a magnetoresistive film formed on a substrate, a magnetic sensor device having the magnetoresistive element, and a method for manufacturing the magnetoresistive element. Background technique [0002] In a rotary encoder that detects rotation of a rotor relative to a stator, for example, a magnet is provided on the rotor side, and a magnetic sensor device having a magnetoresistive element is provided on the stator side. In the magnetoresistive element, a magnetoresistive film made of Ni-Fe or the like is formed on one surface of the substrate, and based on an output from a two-phase (A-phase and B-phase) bridge circuit made of the magnetoresistive film, The angular velocity, angular position, and the like of the rotor are detected (for example, refer to Patent Document 1). [0003] When manufacturing the magnetoresistive element, a magnetoresistive film is formed on one surface of the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/08H01L43/12
Inventor 八幡亮一
Owner SANKYO SEIKI MFG CO LTD
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