Resonator element, resonator, electronic device, electronic apparatus, and moving object

Abstract

A resonator element includes a vibrating portion that vibrates in a thickness shear vibration and includes a first main surface and a second main surface which are in a front and back relationship to each other, a first excitation electrode that is provided on the first main surface, and a second excitation electrode that is provided on the second main surface, and an energy trapping coefficient M satisfies a relationship of 33.6≰M≰65.1.

Description

technical field [0001] The present invention relates to a vibrating element, a vibrator, an electronic device, electronic equipment and a moving body. Background technique [0002] AT-cut crystal resonators that vibrate with thickness shear vibration as the main vibration mode are suitable for miniaturization and high frequency, and have excellent frequency-temperature characteristics, so they are used in oscillators and electronic equipment. Especially in recent years, with the increase in the processing speed of transmission communication equipment and OA (Office Automation: Office Automation) equipment, or the progress of communication data and the increase in the capacity of processing, the demand for high frequency is relatively high compared to the used It is enhanced by the AT-cut crystal oscillator of the reference frequency signal source of the oscillator or electronic equipment. [0003] In general, in an AT-cut crystal vibrator with thickness shear vibration as t...

AI Technical Summary

Problems solved by technology

When only the main vibration of the crystal resonator is intended to be in the enclosed mode, the electrode film needs to be thinned, and when the electrode film is 100nm or less, the sheet resistance will increase rapidly, which will cause a relatively large vibration in the excitation electrode part or lead electrode part. Large ohmic loss (resistive loss due to sheet resistance), resulting in a problem that the CI value of the crystal resonator increases

[0007] However, when the thickness of the electrode is increased to reduce the ohmic loss of the electrode film, there is a problem that, in addition to the main vibration, many anharmonic mode vibrations are enclosed to generate spurious oscillations. , compared with the CI value of the main vibration, the CI value of the spurious oscillation closer to the main vibration becomes smaller, and the oscillator circuit vibrates at the resonant frequency of the spurious oscillation

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