Test method and text system for simulating air exhaust technology of dry vacuum pump

A dry vacuum pump and process simulation technology, applied in pump testing, pump, pump control, etc., to achieve intelligent green environmental protection, good application prospects, and good repeatability
CN104632604AActive Publication Date: 2015-05-20SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
Publication Date
2015-05-20

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Abstract

Disclosed are a vacuum pump air exhaust process simulating and testing method and a testing system. By means of a built simulating vacuum chamber, common elements in various dry-type vacuum pump application environments such as gas, liquid, electricity, magnetism, heat, dust, and corrosion are integrated, various sensors are used to perform feedback on a signal simultaneously having temperature, humidity, gas ingredient, real-time image, pressure, traffic and noise, and multiple control systems are used to perform monitoring, so as to check and improve dry-type vacuum pump air exhaust process adaptation situations. The testing system uses strict contaminant collecting and shuttling treatment, has a danger warning and automatic protecting function system, is characterized by being secure, intelligent, and green and environment-friendly, has good repeatability, and may simulate vacuum pump air exhaust process environments such as cleaning, mildly-polluted, intermediately-polluted and seriously-polluted vacuum environments comprising transfer, physical vapor deposition, chemical vapor deposition, etching, photolithography, chemical engineering, and pharmacy.
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Description

technical field

[0001] The invention belongs to the technical field of vacuum pumps, and in particular relates to a simulation test method and a simulation test system of a dry vacuum pump pumping process. Background technique

[0002] In recent years, with the large-scale rise of emerging strategic industries such as semiconductor electronics, photovoltaics, flat panel displays, semiconductor lighting, and solar photovoltaics, and the industrial upgrading of the chemical, pharmaceutical, and food packaging industries, the demand for dry vacuum pumps in various industries has further increased. The dry pump manufacturing industry is developing rapidly. With the increasing demand for dry vacuum pumps at home and abroad, the requirements for dry vacuum pumps are becoming more and more stringent, and the vacuum pump manufacturing industry is facing huge challenges and opportunities. The application occasions of dry vacuum pumps are becoming more and more extensive, and the div...

Claims

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