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Wafer Tooling Flower Basket Conveyor System

A technology of conveying system and tooling, which is applied in the field of silicon wafer tooling flower basket conveying system, which can solve problems such as overlapping jamming, restriction of inserting speed, collision, etc.

Active Publication Date: 2017-01-11
ZHANGJIAGANG ULTRASONIC & ELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] With the advancement of automation, when inserting silicon wafers, the empty tooling baskets to be filled with silicon wafers are mostly conveyed by conveyor belts. Adjacent tooling flower baskets will collide or even overlap and get stuck. In serious cases, the machine needs to be shut down. processing, it greatly restricts the speed of inserting

Method used

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  • Wafer Tooling Flower Basket Conveyor System
  • Wafer Tooling Flower Basket Conveyor System
  • Wafer Tooling Flower Basket Conveyor System

Examples

Experimental program
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Embodiment Construction

[0014] Below in conjunction with the embodiment shown in the accompanying drawings, the present invention is described in detail as follows:

[0015] The front and rear directions in this manual refer to the forward and backward directions of the tooling flower basket moving along the conveyor belt, that is, the attached figure 1 And attached figure 2 The right in the middle is the front, and the left is the rear.

[0016] as attached figure 1 , attached figure 2 and attached image 3 As shown, a silicon wafer tooling flower basket conveying system includes a track 11 for the tooling flower basket 20 to move, and two synchronously moving conveyor belts 12 arranged in the track 11 along the length direction. The two conveyor belts 12 are parallel, and the tooling flower basket The lower surface of 20 is provided with two supporting ribs, and the two supporting ribs fall on the corresponding conveyor belts 12 respectively. A rocker 14 is hingedly arranged on th...

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PUM

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Abstract

The invention discloses a silicon wafer tool basket conveying system. The silicon wafer tool basket conveying system comprises tracks for tool baskets to move and two simultaneously moving conveying belts arranged in the tracks along the length direction, wherein the two conveying belts are parallel to each other; two supporting ribs are arranged on the lower surfaces of the tool baskets; the two supporting ribs respectively fall onto the corresponding conveying belts; a supporting plate is arranged between the two conveying belts; a lifting rod is arranged on the supporting plate through a transverse shaft in a hinged mode. When the tool baskets are located in a target region, the rear end part of the lifting rod is lifted and abuts against the side wall of a subsequent tool basket, and the subsequent tool basket is separated from the current tool basket, so that the two tool baskets are prevented from colliding or being blocked; after the current tool basket is moved away, the subsequent tool basket retreats at a certain distance and then goes forward again so that the subsequent tool basket can successfully arrive the target region, and the tool baskets are conveyed one by one in a successive circulation mode. The silicon wafer tool basket conveying system is simple in structure, low in cost and reliable in motion, and is beneficial for improving the wafer inserting speed.

Description

technical field [0001] The invention relates to a silicon wafer inserting device, in particular to a silicon wafer tooling flower basket conveying system. Background technique [0002] With the advancement of automation, when inserting silicon wafers, the empty tooling baskets to be filled with silicon wafers are mostly conveyed by conveyor belts. Adjacent tooling flower baskets will collide or even overlap and get stuck. In serious cases, the machine needs to be shut down. Processing, just greatly restricts the speed of inserting sheet. Contents of the invention [0003] The object of the present invention is to provide a silicon wafer tooling flower basket conveying system, which is provided with a seesaw on the conveying path of the tooling flower basket, so that when the current tooling flower basket is in the target area to be taken away, the second bar of the seesaw can be tilted Lift up and touch the next tooling flower basket to prevent the two from colliding...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/07
Inventor 陈宏
Owner ZHANGJIAGANG ULTRASONIC & ELECTRIC