Wafer Tooling Flower Basket Conveyor System
A technology of conveying system and tooling, which is applied in the field of silicon wafer tooling flower basket conveying system, which can solve problems such as overlapping jamming, restriction of inserting speed, collision, etc.
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[0014] Below in conjunction with the embodiment shown in the accompanying drawings, the present invention is described in detail as follows:
[0015] The front and rear directions in this manual refer to the forward and backward directions of the tooling flower basket moving along the conveyor belt, that is, the attached figure 1 And attached figure 2 The right in the middle is the front, and the left is the rear.
[0016] as attached figure 1 , attached figure 2 and attached image 3 As shown, a silicon wafer tooling flower basket conveying system includes a track 11 for the tooling flower basket 20 to move, and two synchronously moving conveyor belts 12 arranged in the track 11 along the length direction. The two conveyor belts 12 are parallel, and the tooling flower basket The lower surface of 20 is provided with two supporting ribs, and the two supporting ribs fall on the corresponding conveyor belts 12 respectively. A rocker 14 is hingedly arranged on th...
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