Single-row time-grating linear displacement sensor based on tectonic movement optical field

Abstract

The invention discloses a single-row time-grating linear displacement sensor based on a tectonic movement optical field. The sensor comprises a light emitting element, a fixed ruler matrix, a movable ruler matrix and a photoelectric detector, wherein the light emitting element consists of a light source matrix and n light source bodies which are equal in size and arranged at intervals; sinusoidal excitation electric signals which are equal in frequency and amplitude and variable in phase are introduced into the n light source bodies to drive; a row of fixed ruler illuminating surfaces are arranged on the fixed ruler matrix; m groups of movable ruler illuminating surfaces which respectively correspond to illuminating regions of the n light source bodies are arranged on the movable ruler matrix, and each group of movable ruler illuminating surfaces and the corresponding fixed ruler illuminating surfaces satisfy special relationships; the photoelectric detector can receive all luminous flux of the m groups of movable ruler illuminating surfaces at the same time and convert the luminous flux into electric signal for outputting. The sensor disclosed by the invention can be used for precisely measuring linear displacement, so that the circuit control difficulty, the mounting difficulty and the difficulty of the processing technique are reduced, and the measuring error is reduced.

Description

technical field [0001] The invention relates to a sensor, in particular to a single-row time grating linear position sensor based on the construction of a moving light field. [0002] motion sensor. Background technique [0003] In the field of precision linear displacement measurement, in recent years, a kind of time grating sensor with clock pulse as the standard of displacement measurement has been developed in China. For example, CN103591896A discloses a time grating linear displacement sensor based on an alternating light field, which adopts the method of forming two standing wave signals by receiving the translucent light on the double-row grating surface, and then synthesizing a traveling wave signal by an adding circuit. Measurement of linear displacement. This time grating linear displacement sensor has the following problems: (1) It is difficult to ensure the consistency of the double-row grating surface during processing, and it is also difficult to ensure that ...

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Problems solved by technology

This time grating linear displacement sensor has the following problems: (1) It is difficult to ensure the consistency of the double-row grating surface during processing, and it is also difficult to ensure that the optical field coupling strength of the two rows of grating surfaces is consistent during installation, resulting in two-way The amplitude of the standing wave signal is inconsistent, which brings measurement error; (2) The signal processing circuit has four photoelectric conversion parts, and it is difficult to control the phase of the four signals at the same time to a certain relationship (the four photoelectric conversion parts will be due to the difference in components. resulting in a phase shift), which also introduces measurement errors

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