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Gradient refractive index waveguide device and preparation method thereof

A gradient index, waveguide device technology, applied in the coupling of optical waveguides, light guides, optics, etc., can solve the problems of reduced precision, reduced fidelity, GRIN lens etching, etc., and achieves good reliability and low cost.

Active Publication Date: 2015-06-03
先进光电子(重庆)有限公司
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Problems solved by technology

[0011] In order to solve the technical problems that the GRIN lens in the waveguide device in the prior art cannot be subjected to layer-by-layer photolithography and etching, the fidelity is reduced, the profile of the waveguide is deteriorated, and the precision is reduced, the present invention provides a gradient index waveguide device and its preparation method

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  • Gradient refractive index waveguide device and preparation method thereof
  • Gradient refractive index waveguide device and preparation method thereof
  • Gradient refractive index waveguide device and preparation method thereof

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Embodiment 1

[0065] The method of the invention performs the growth and etching of the GRIN element layer by layer. Such as Figure 6 The embodiment shown is a multilayer grown GRIN element. In the figure, G1, G2, G3, B, G4, G5, and G6 represent different layers, and T1, T2, T3, T4, T5, and T6 represent the thickness of each layer respectively. The GRIN lens is composed of seven layers, but it can also be composed of other layers. The preparation process of each layer is deposition, photolithography, etching, deposition of the cladding and smoothing the top of the cladding to the top of the GRIN layer. Subsequent layers will be deposited on the basis of the previous layer, photolithography, etching, and then cladding deposition and grinding according to requirements. The refractive index of each GRIN layer in a GRIN lens can be constant, or it can be changed by some rules. The layers are stacked to form GRIN components. This layer-by-layer manufacturing method can well control the ref...

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Abstract

The invention relates to a gradient refractive index waveguide device and a preparation method thereof. The gradient refractive index waveguide device comprises a GRIN (Gradient Refractive Index) lens and a coating layer, wherein the GRIN lens comprises a substrate, a waveguide layer and at least two GRIN layers; the GRIN layer at the most bottom layer is deposited on the substrate; the waveguide layer is arranged between two adjacent GRIN layers; the coating layer coats the outer side of the GRIN lens; the refractive index is gradually increased from the GRIN layer at the most top layer or the GRIN layer at the most bottom layer to the waveguide layer. The gradient refractive index waveguide device disclosed by the invention solves the technical problem that the GRIN lens in the existing waveguide device cannot be photoetched or etched layer by layer, so that the fidelity is descended, and the precision is reduced; the GRIN lens is prepared by a PLC technology; the PLC technology is advantaged by that the GRIN layers and the waveguide layer in the GRIN lens can be integrated on the same chip, so that the GRIN lens prepared by the PLC technology has the advantages of monolithic integration, low cost and good reliability.

Description

technical field [0001] The invention relates to a gradient refractive index waveguide device and a preparation method thereof. Background technique [0002] Graded-index waveguides (also known as GRIN waveguides or GRIN lenses) have the ability to focus light in one or more dimensions. The lens property of GRIN lens can be used to couple two waveguides with large difference in spot size. For example, if Figure 1a , Figure 2a , Figure 3a , Figure 4a , Figure 5 As shown, it can be used for coupling between optical fiber 1 and waveguides of smaller size. GRIN lenses can also be used for light sources with large divergence angles (such as Figure 5 The collimation and refocusing of the light emitted by the semiconductor laser 4 is shown). In this application the GRIN lens functions like an imaging optic. [0003] Fig. 3 is a schematic diagram of optical fiber to PLC optical waveguide coupling using a monolithic integrated GRIN lens. It is assumed here that there is...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/32G02B3/00
CPCG02B6/1245
Inventor 罗伊布兰特
Owner 先进光电子(重庆)有限公司
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