Method for machining tiny grooves through ultrasonic grinding
A processing method and ultrasonic technology, applied in the direction of grinding workpiece supports, metal processing equipment, manufacturing tools, etc., can solve the problems of complex processing device and control, low precision and processing efficiency, poor processing consistency, etc., to improve grinding efficiency. Effect
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[0020] The present invention will be further described below in conjunction with the accompanying drawings.
[0021] refer to Figure 1 to Figure 5 , a micro-die processing method for ultrasonic grinding, the processing equipment of the method includes a container 12 for storing the grinding liquid, the bottom surface of the inner cavity of the container 12 is a workbench 3, and a substrate 9 is fixed on the workbench 3 , above the substrate 9, a positioning plate 8 and a vibrating plate 6 are arranged in sequence, the vibrating plate 6 is located above the positioning plate 8, and the two sides of the positioning plate 8 have lower mounting holes, and the vibrating plate There are upper installation holes on both sides of 6, and the lower end of the pin 11 is fixed on the substrate 9, and the middle part of the pin 11 is provided with an upper convex hull and a lower convex hull arranged from top to bottom, and the pin 11 passes through The upper installation hole and the lo...
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