A dicing machine and control method for real-time monitoring of tool temperature and wear

Abstract

The invention discloses a dicing saw capable of monitoring the temperature and the abrasion degree of a cutter in real time. The dicing saw comprises an X axis, a Y axis, a Z axis, a main shaft frequency variable motor, a rack of the main shaft frequency variable motor, a first cooling device, a second cooling device, an infrared temperature measuring device, a first laser scanning detection device and a second laser scanning detection device, wherein a first walking motor is arranged on the X axis; a second walking motor is arranged on the Y axis; a third walking motor is arranged on the Z axis; the first cooling device and a blade are sequentially and fixedly arranged at the front end of the main shaft frequency variable motor; the rack of the main shaft frequency variable motor is connected with the first walking motor, the second walking motor and the third walking motor on the X axis, the Y axis and the Z axis; a U-shaped fixing rack is connected with the rack of the main shaft frequency variable motor in a turnover manner; the second cooling device, the second laser scanning imaging detection device, the infrared temperature measuring device and a laser horizontal calibration device are arranged at the other end of the U-shaped fixing rack through a calibration walking mechanism and a calibration motor. The dicing saw has the advantages that the blade is relatively long in service life and the cutting effect is good.

Description

technical field [0001] The invention relates to the field of processing machinery for semiconductor materials or glass, piezoelectric ceramics, sapphire and other materials, in particular to a scribing machine and a control method for real-time monitoring of tool temperature and wear degree. Background technique [0002] The working mechanism of the dicing machine is powerful cutting, that is, the spindle drives the high-speed rotating blade to cut the processed device. During the cutting process of the dicing machine, the blade and the processed device will generate a lot of heat, which will increase the temperature of the blade and the processed device. Excessively high temperature will seriously affect the cutting quality and greatly shorten the service life of the blade. The temperature of the blade and the processed device needs to be sprayed with a cooling medium to the blade and the processed device to cool them during the cutting process. The dicing machine is a kin...

AI Technical Summary

Problems solved by technology

If the wear or damage of the tool exceeds the limit value, the cutting effect and accuracy will be greatly affected, and even cause damage to the equipment or the processing object

[0003] The tool cooling device on the existing dicing machine can only spray the cooling medium on the axial side of the blade, and the cooling effect is not ideal; a dicing machine and its control method for real-time monitoring of tool temperature and wear have not yet been reported

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