A three-dimensional packaging structure of microwave circuits with circuits arranged on the front and back sides of an ltcc substrate
A microwave circuit and three-dimensional packaging technology, which is applied in the direction of circuits, electrical components, and electric solid devices, can solve the problems of complex assembly process and large packaging volume, and achieve the effects of simplified assembly process, large contact area, and small volume
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[0019] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0020] The present invention includes:
[0021] A LTCC (low temperature co-fired ceramic) substrate 1 with a thickness of about 2mm. The LTCC substrate 1 is laminated with several layers (5-30 layers) of ferro A6s material with a thickness of 0.094mm (single layer thickness) and then heated at 850°C-900°C ℃ low temperature co-firing, the upper and lower surfaces of the LTCC substrate 1 form a microwave circuit with certain functions through a micro-assembly process, the through hole 4 running through the LTCC substrate 1 is filled with metal, and the function of the through hole 4 filled with metal is for LTCC The circuit connection of the microwave board on the upper and lower surfaces (front and back) of the substrate. The lower surface of the LTCC substrate is...
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