Complex radial flow pump, combined radial flow pump and air extraction system

A technology of radial flow and air extraction grooves, which is applied to radial flow pumps, parts of pumping devices for elastic fluids, pumps, etc., which can solve the problem of low linear velocity inside the rotor flat plate, reduced air extraction performance of radial flow pumps, and reduced Radial flow molecular pump pumping performance and other issues, to achieve the effect of saving pumping energy consumption, saving equipment, and improving the quality of vacuum products
CN104806535AActive Publication Date: 2015-07-29储继国
7 Cites 8 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
储继国
Publication Date
2015-07-29

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention provides a complex radial flow pump. The complex radial flow pump comprises a shell, wherein air inlets and air exhausts are formed in the shell, a rotor, a static wheel and a dynamic seal are arranged in the shell, two moving wheels are fixedly arranged on the rotor, the static wheel is arranged between the two moving wheels, and a communication air hole is formed in the outer side of the static wheel; spiral air extraction grooves with the same shape are formed in the upper side and the lower side of the static wheel respectively, and the air extraction grooves in the upper side of the static wheel and the air extraction grooves in the lower side of the static wheel share the same groove bottom, an opening is formed in the groove bottom, and the opening ratio of the opening ranges from 0% to 100%; the dynamic seal is located below the moving wheels, a plurality of spiral dynamic seal grooves are formed in the upper side of the dynamic groove and are used for separating the air inlets and the air exhausts of the air extraction grooves. According to the complex radial flow pump, because two traditional single-traction radial flow pumps are connected in parallel back to back, and the opening is formed in the groove bottom, the extraction speed is remarkably increased. The invention further provides a combined radial flow pump which comprises the complex radial flow pump, and three application embodiments of the complex radial flow pump.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention belongs to the technical field of obtaining vacuum, and in particular relates to a compound radial flow pump, a combined radial flow pump including the compound radial flow pump, and an air extraction system including the compound radial flow pump or the combined radial flow pump. Background technique

[0002] At present, medium vacuum (pressure 0.1~100Pa) is a variety of high-end vacuum industries enhanced by low-pressure plasma (magnetron sputtering, cathode arc source, plasma enhanced chemical vapor deposition, etc.), as well as molecular distillation, freeze drying and electric capacitor Traditional Roots pumps and molecular pumps are widely used in the gathering section of industries such as industrial areas. Among them, Roots pumps are bulky, high in energy consumption, and there is oil vapor pollution, and the pumping speed of molecular pumps in this section is greatly increased. decline, or even can not run, affecting the developm...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More