Micro-cantilever heat vibration signal measuring device
A technology of signal measurement and micro-cantilever, applied in the field of optical measurement
Inactive Publication Date: 2015-08-05
SHAOXING UNIVERSITY
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Problems solved by technology
In this case, the thermal vibration signals of most frequencies are submerged in the background noise of the atomic force microscope, and it is difficult to effectively measure and study the thermal vibration signals in such a high background noise
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[0020] figure 1 Shown is a schematic structural diagram of a micro-cantilever beam thermal vibration signal measurement device provided by an embodiment of the present invention. figure 2 shown using figure 1 A comparison chart of the thermal vibration power spectrum and background noise power spectrum of the atomic force microscope micro-cantilever measured by the micro-cantilever thermal vibration signal measuring device shown, and the background noise power spectrum of the micro-cantilever measured by the existing atomic force microscope. Please also refer to figure 1 and figure 2 .
[0021] Such as figure 1 As shown, the microcantilever thermal vibration signal measurement device provided in this embodiment includes an incident light path assembly 100 and a two-way detection light path assembly 200 . The incident optical path assembly 100 includes a linear polarizer 110 , a first beam splitter 120 , a Wollaston prism 130 , a first converging lens 140 and a second be...
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Abstract
The invention provides a micro-cantilever thermal shock signal measuring apparatus. The apparatus comprises an incident optical path assembly and two detection optical path assemblies. The incident optical path assembly comprises a line polarizer, a first spectroscope, a Wollaston prism, a first convergent lens and a second spectroscope. Polarization laser forms two beams of incident ray polarized light with mutually vertical polarization directions through the line polarizer, the first spectroscope and the Wollaston prism, after convergence, is respectively vertically incident to the tip end and the substrate of a cantilever arm, after reflection respectively, forms two beams of reflection polarized light with mutually vertical polarization directions, converges through the Wollaston prism and is incident to the second spectroscope to form two beams of detection polarized light. Each detection optical path assembly comprises a photoelectric detection circuit, the two beams of detection polarized light are respectively incident to the two photoelectric detection circuits, and the photoelectric detection circuits, after converting optical signals into electric signals, obtain a phase difference of the two beams of reflection line polarized light through calculating the two electric signals.
Description
technical field [0001] The invention relates to the field of optical measurement, and in particular to a micro-cantilever thermal vibration signal measurement device. Background technique [0002] Atomic Force Microscopy (AFM) is a high-precision analytical instrument for studying the surface structure of materials. It is widely used in materials, chemistry, biotechnology, nanotechnology and other fields. The force between atoms is used to study the surface structure and properties of matter. One of its main structures is a micro-cantilever beam. The interaction between the tip of the micro-cantilever beam and the sample makes the micro-cantilever beam deform, so that the atomic force microscope can measure extremely small forces. [0003] The vibration of the micro-cantilever beam caused by thermal noise-thermal vibration is an important factor affecting the resolution of the atomic force microscope. The measurement and research of thermal vibration will help to understand...
Claims
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IPC IPC(8): G01N21/01G01H9/00
Inventor 李天军方泽波
Owner SHAOXING UNIVERSITY