A Quartz Double Beam Force-Frequency Resonator with Integrated Temperature Sensitive Unit
A technology of sensitive unit and frequency resonance, which is applied in the field of sensing and detection, can solve the problems of accelerometer performance degradation and other problems, and achieve the effect of easy processing
Active Publication Date: 2018-02-02
SOUTHEAST UNIV
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Problems solved by technology
[0005] Purpose of the invention: In order to solve the technical problems existing in the prior art, the present invention proposes a quartz double-beam force-frequency resonator with an integrated temperature sensitive unit, which mainly solves the problem of performance degradation of the accelerometer when the ambient temperature changes drastically. A temperature-sensitive resonator is integrated on the beam combined with the base, which can accurately measure and compensate the temperature on the quartz double beam in real time
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[0025] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0026] Such as figure 1 As shown, the quartz double-beam force-frequency resonator integrated with the temperature-sensitive unit of the present invention includes a quartz double-beam force-frequency resonator part and a temperature-sensitive part, and the two parts are an integrated structure. The quartz double-beam force-frequency resonator part is composed of a quartz double-beam 1 and a double-beam joint base 2 respectively arranged at both ends of the quartz double-beam 1 . The length direction of the quartz double-beam force-frequency resonator part is the Y-axis direction of the quartz crystal ( figure 1 The horizontal direction), the width direction is the X-axis direction of the quartz crystal ( figure 1 vertical direction), the thickness direction is the Z-axis direction of the quartz crystal ( figure 1 vertical in-plane direction). Quartz double beam ...
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The invention discloses a quartz double-beam force-frequency resonator with an integrated temperature-sensitive unit, which includes a quartz double-beam force-frequency resonator part and a temperature-sensitive part in an integrated structure. The resonant modes and resonant frequencies of the two are different and can coexist And do not interfere with each other. Among them, the quartz double-beam force-frequency resonator part is composed of quartz double-beams and joint bases at both ends, and works in the in-plane bending vibration mode. The resonant frequency is sensitive to the axial tensile and compressive stress of the double-beams, but not sensitive to temperature; The temperature sensitive part is composed of torsion fork, connecting fixed part and tuning fork combined base, it works in torsional mode, the torsional frequency is a function of temperature, sensitive to temperature, but insensitive to axial tension and pressure. The invention can reflect the real temperature and temperature change of the force-frequency resonator in real time and accurately, thereby completing the compensation for the temperature drift of the quartz double-beam force-frequency resonator, and the temperature-sensitive part outputs digital signals, which is convenient for signal processing and has the advantages of Advantages of miniaturization.
Description
technical field [0001] The invention belongs to the field of sensing and detection, and in particular relates to a quartz double-beam force-frequency resonator integrating a temperature sensitive unit. Background technique [0002] Quartz double-ended fixed tuning fork is a force-frequency resonator based on in-plane bending vibration mode, which has the advantages of direct output digital signal, stable temperature characteristics, wide dynamic range, high sensitivity, and mass production. The two beams of the resonator vibrate in opposite directions with a phase difference of 180 degrees, so that the force and moment generated at the fixed part of the beam connection cancel each other, reduce the loss of vibration energy, and obtain a high quality factor without special vibration isolation system. Using the piezoelectric effect of the quartz crystal itself, the vibration frequency of the double beam can be excited and detected without adding additional devices, so it has ...
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IPC IPC(8): G01P15/097G01L1/10
Inventor 梁金星白凤蕊
Owner SOUTHEAST UNIV