Method for determinacy shape correction processing based on surface shape error slope

Abstract

The invention discloses a method for determinacy shape correction processing based on the surface shape error slope. The method comprises the first step of inputting the surface shape error slope and a height removal function of a to-be-processed optical part; the second step of converting the height removal function into a slope removal function; the third step of utilizing a deconvolution calculation method to calculate a dwell time function according to convolution relations of the slope removal function, the surface shape error slope and the dwell time function required for determinacy shape correction processing control; the fourth step of performing the determinacy shape correction processing on the surface of the to-be-processed optical part based on the calculated dwell time functions. The dwell time necessary for the processing control is calculated by directly using surface shape error slope data obtained through measurement, the surface shape error slope does not need to be converted into the surface shape error height, so that the conversion error caused by the fact that the surface shape error slope is converted to the surface shape error height is avoided, and the method is favorable for improving the determinacy in the processing process and improving processing accuracy.

Description

Technical field [0001] The invention relates to the field of optical processing, in particular to a deterministic modification processing method for one-dimensional optical parts based on the slope of the surface shape error. Background technique [0002] The models and calculations used in the current optical processing methods (that is, computer-controlled deterministic modification processing methods) are based on the height of the surface error. In this case, it is called the deterministic modification processing method based on the height of the surface error. In the deterministic modification processing method based on the height of the surface error, the surface error is expressed in the form of height, and the amount of material removal (height) during processing is equal to the convolution of the removal function and the residence time. [0003] The surface error slope is more and more widely used as a new surface error indicator, especially in high-precision glancing mirr...

AI Technical Summary

Problems solved by technology

However, such conversion, due to the influence of the original measurement error, will greatly increase the uncertainty of the converted error height, which will inevitably affect the effect of deterministic optical processing and affect the final processing accuracy

[0005] To sum up, the deterministic surface modification processing method based on the surface error height in the existing technology can no longer adapt to and meet the new optical processing requirements with the surface error slope as the evaluation index and measurement output.

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