Spherical surface shape rotation and translation absolute detection method

Abstract

The invention discloses a spherical surface shape rotation and translation absolute detection method. According to the method of the invention, based on the measurement data of the rotation and translation of a detected spherical surface are utilized, an equation set of Zernike polynomial coefficients which are about the detected spherical surface and a reference surface is constructed through adopting a Zernike polynomial fitting-based rotation and translation algorithm, and the coefficients of a Zernike polynomial are solved through utilizing a least square method, and therefore, the absolute surface shapes of the detected spherical surface and the reference surface can be obtained; and adjustment errors in large-numerical value aperture spherical surface phase-shift detection are adopted as independent error terms, and the adjustment errors are applied to an absolute detection process, and the adjustment errors and interferometer system errors are removed together from test wave surface data, and therefore, computation accuracy can be improved, and the method has an important application value.

Description

technical field [0001] The invention belongs to the field of precision optical measurement, and in particular relates to an absolute detection method of a spherical surface. Background technique [0002] With the development of modern optical technology, the machining accuracy of spherical optical elements is getting higher and higher, and the requirements for detection accuracy are also getting higher and higher. The absolute detection technology of rotation and translation can effectively improve the detection accuracy and obtain more accurate surface shape information. [0003] At present, the absolute detection methods of the spherical surface mainly include the two-sphere method and the small-sphere average method, and the absolute detection methods of the plane mainly include the three-plate method and its extension. The three-plate method requires three plates, and one of the plates needs to be turned over, and the factor of gravity influence cannot be eliminated in t...

AI Technical Summary

Problems solved by technology

The three-plate method requires three plates, and one of the plates needs to be turned over, and the factor affected by gravity cannot be eliminated in the vertical working condition.

Another similar method --- translational shear absolute detection in the actual operation process, because the translation mechanism can not be completely ideal, resulting in a large quadratic error, including astigmatism and defocus

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