Spherical surface shape rotation and translation absolute detection method

A technology of rotation, translation and absolute detection, which is applied in the direction of measuring devices, instruments, and optical devices, etc., and can solve the problems that the factors affected by gravity cannot be eliminated, and the error of the large quadratic term, etc.

Inactive Publication Date: 2015-09-16
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The three-plate method requires three plates, and one of the plates needs to be turned over, and the factor affected by gravity cannot be eliminated in the vertical working condition.
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  • Spherical surface shape rotation and translation absolute detection method
  • Spherical surface shape rotation and translation absolute detection method
  • Spherical surface shape rotation and translation absolute detection method

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Embodiment

[0072] In the embodiment, the method of the present invention is used to detect the spherical surface of a mirror to be measured (3) with a radius of curvature of 36.7mm and a numerical aperture of 0.7, and the steps for absolute detection of rotation and translation of the spherical surface of the mirror to be measured (3) are:

[0073] Step 1: Use the Zygo GPI interferometer to detect the spherical surface of the mirror to be tested (3), wherein the light wavelength of the interferometer is 632.8nm, and the peak-to-valley (PV) value of the surface shape detection accuracy is better than λ / 10. A set of original surface shape data of the spherical surface of the mirror to be tested (3) detected by the interferometer:

[0074] W 1 = W r + Σ i ...

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Abstract

The invention discloses a spherical surface shape rotation and translation absolute detection method. According to the method of the invention, based on the measurement data of the rotation and translation of a detected spherical surface are utilized, an equation set of Zernike polynomial coefficients which are about the detected spherical surface and a reference surface is constructed through adopting a Zernike polynomial fitting-based rotation and translation algorithm, and the coefficients of a Zernike polynomial are solved through utilizing a least square method, and therefore, the absolute surface shapes of the detected spherical surface and the reference surface can be obtained; and adjustment errors in large-numerical value aperture spherical surface phase-shift detection are adopted as independent error terms, and the adjustment errors are applied to an absolute detection process, and the adjustment errors and interferometer system errors are removed together from test wave surface data, and therefore, computation accuracy can be improved, and the method has an important application value.

Description

technical field [0001] The invention belongs to the field of precision optical measurement, and in particular relates to an absolute detection method of a spherical surface. Background technique [0002] With the development of modern optical technology, the machining accuracy of spherical optical elements is getting higher and higher, and the requirements for detection accuracy are also getting higher and higher. The absolute detection technology of rotation and translation can effectively improve the detection accuracy and obtain more accurate surface shape information. [0003] At present, the absolute detection methods of the spherical surface mainly include the two-sphere method and the small-sphere average method, and the absolute detection methods of the plane mainly include the three-plate method and its extension. The three-plate method requires three plates, and one of the plates needs to be turned over, and the factor of gravity influence cannot be eliminated in t...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 高志山史琪琪杨忠明李闽珏王新星田雪王帅成金龙
Owner NANJING UNIV OF SCI & TECH
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