Surface deviation detection device and method based on polarization interference

A technology of deviation detection and surface shape, applied in the detection of local deviation, astigmatism deviation, non-destructive testing of spherical lens curvature radius deviation, to achieve the effect of high contrast, reduce errors and improve accuracy

Inactive Publication Date: 2015-09-30
FUJIAN NORMAL UNIV
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  • Surface deviation detection device and method based on polarization interference
  • Surface deviation detection device and method based on polarization interference

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[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0021] like Figure 1~2 As shown, the method scheme of the present invention is that the device used in the detection method is a polarization beam splitter 1 (the glued surface is coated with a polarization splitting dielectric film) formed by gluing the slopes of two equilateral rectangular prisms. A laser beam expander 5 with fixed positioning, a fixed detection laser light source 6 directly below the laser beam expander 5, and a polarizer 4 are arranged between the polarization beam splitter 1 and the detection laser light source 6, and the polarization beam splitter 1 The first 1 / 4 wave plate 2 with a fixed position on the right, the lens to be tested 3 on the right of the first 1 / 4 wave plate 2, the receiving screen 8 with a fixed position on the left of the polarization beam splitter 1, and The polarizer 7 is set at any positi...

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Abstract

The invention relates to a surface deviation detection device and method based on polarization interference. The device comprises a polarization beam splitter, wherein a laser beam expander, a detection laser source as well as a polarizer arranged between the polarization beam splitter and the detection laser source are arranged right below the polarization beam splitter; a first 1/4 wave plate and a to-be-tested lens are fixed on the right side of the polarization beam splitter in a positioned manner; a receiving screen is fixed on the left side of the polarization beam splitter in a positioned manner; an analyzer is arranged on the left side of the polarization beam splitter; a second 1/4 wave plate is fixed right above the polarization beam splitter in a positioned manner; an optical template is arranged right above the second 1/4 wave plate. By the aid of the device, a polarization interference method can be adopted, two coherent beams have approximately equal light intensities, fringe brightness is adjustable, effects caused by optical noise such as stray light and the like can be inhibited, interference fringes with the high contrast ratio can be obtained, errors of image post-processing can be reduced, the lens detection precision can be improved, and meanwhile, the curvature radius of the to-be-tested surface of the to-be-tested lens can be calculated.

Description

technical field [0001] The invention relates to a surface deviation detection device and method of polarization coherent technology, and is particularly suitable for non-destructive testing methods for detecting curvature radius deviation, astigmatism deviation and local deviation of spherical lenses. Background technique [0002] At present, the surface deviation of optical parts after polishing is usually detected by optical template or interferometer. The inspection method is based on the interference principle of light, and the surface deviation of optical parts is inspected in the optical workshop. The commonly used methods are interference pattern method and shadow Law. Interferogram method can be divided into contact method (i.e. template method) and non-contact method (i.e. interferometer method). [0003] In the optical workshop, the surface deviation of optical lenses is usually detected by the optical template method, and the final inspection of the lens after i...

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Application Information

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IPC IPC(8): G01M11/02
Inventor 王敏黄德炜王芬林峰
Owner FUJIAN NORMAL UNIV
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