Automatic focusing system
An automatic focus and lens technology, applied in radio wave measurement system, installation, re-radiation of electromagnetic waves, etc., can solve the problems of non-existence of wide-band automatic focus system, poor positioning accuracy, and chromatic aberration, so as to improve performance and ensure accuracy , the effect of optional spectral width
Active Publication Date: 2015-09-30
RAINTREE SCI INSTR SHANGHAI
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[0004] At present, among the common autofocus systems in China, a part is the laser autofocus system, which has the advantages of high efficiency and accurate positioning, but the disadvantage is that it will fail if it encounters materials that are not sensitive or absorb specific spectra.
There is also a wide-spectrum automatic focusing system, which has the advantage of a wide range of materials that can be focused. For some specific materials, it can achieve penetrating focus. The disadvantage is that there is chromatic aberration and the positioning accuracy of different wavelengths is slightly poor.
[0005] However, there is no autofocus system with wide band and no chromatic aberration in the prior art
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[0028] In the detailed description of the following embodiments, description is made with reference to the drawings constituting a part of the description. The drawings show specific embodiments by way of example, and the present invention is implemented in these embodiments. The illustrated embodiments are not meant to exhaust all embodiments according to the present invention. It can be understood that other implementation manners can be utilized, and structural or logical changes can be made without departing from the scope of the present invention. For the drawings, directional terms, such as "lower", "upper", "left", "right", etc., are used with reference to the orientation of the described drawings. Since the components of the embodiments of the present invention can be implemented in a variety of orientations, these directional terms are used for explanatory purposes rather than limiting purposes. Therefore, the following specific embodiments are not in a limiting sens...
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An automatic focusing system comprises a light source, a collimating lens, a spectroscope, an object lens, a reception lens, a cylindrical mirror and a light sensor, wherein the light source, the collimating lens, the spectroscope and the object lens are sequentially arranged to project light from the light source on a first optical path to be projected onto a surface to be detected, the reception lens is arranged on the spectroscopic path of the spectroscope, the cylindrical mirror is arranged between the reception lens and the light sensor, the reflected light from the surface to be detected is projected onto the light sensor on the second optical path, and the light sensor calculates the ideal position scope of the surface to be detected to the object lens according to the images of the surface to be detected. The cylindrical mirror is a reflective cylindrical mirror, and the collimating lens, the object lens and the reception lens are achromatic lenses. The focusing materials are wide in scope and selectable spectrum, and high precision and performance are ensured.
Description
Technical field [0001] The invention relates to an automatic focusing system, which is especially suitable for semiconductor measuring equipment. Background technique [0002] Automatic Focus System (Automatic Focus System) is a system that uses light waves, ultrasonic waves or other sound waves to automatically calculate the focal length and determine the focus position. Usually divided into active and passive. Active means that the system itself emits light waves or ultrasonic waves to the measured object, and the receiver receives the reflected signal to complete autofocus; passive means that the system directly receives and analyzes what is emitted or reflected by the measured object Light waves to complete automatic focusing. [0003] The application range of autofocus systems is very wide, such as cameras, infrared flaw detection, distance measurement, surface analysis, imaging and other aspects. Civil, industrial and military applications are involved. The autofocus system...
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IPC IPC(8): G02B7/28G01S17/06
Inventor 叶薇薇李岩川高海军
Owner RAINTREE SCI INSTR SHANGHAI