Core body of high-temperature and high-pressure sensor

Abstract

The invention discloses a core body of a high-temperature and high-pressure sensor. The core body comprises a base (1), a pressing ring (2), a pressure sensing diaphragm (3) and a sensitive chip (4); the pressing ring (2) is connected onto the base (1); the periphery of the pressure sensing diaphragm (3) is fixed between the base (1) and the pressing ring (2) in a sealed manner; and a silicon oil cavity filled with silicon oil is formed between the pressure sensing diaphragm (3) and the base (1); the sensitive chip (4) is arranged in the silicon oil cavity and is fixedly connected with the base (1); the sensitive chip (4) is connected with a lead (10) which passes through the base (1); and the base (1) is provided with an oil injection channel (5) communicated with the silicon oil cavity and the outside. With the above technical schemes of the invention adopted, the core body of the high-temperature and high-pressure sensor has the advantages of simple overall structure, convenience in realization, low cost and convenience in popularization and application.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a core body of a high temperature and high pressure difference sensor. Background technique [0002] Sensors are measuring devices that convert non-electrical signals such as pressure, temperature, flow, and gas into electrical signals. In aviation, aerospace and other fields, sensors are used to measure air attitude, pressure, temperature, acceleration and other parameter information. Some sensor measurement parameters directly participate in the control of the system. The accuracy of these parameter measurement plays a crucial role in the success of the mission. important role. In the civilian field, sensors are more widely used, such as automobiles, mobile phones, household appliances, etc. [0003] Most of the current pressure sensors work at normal temperature or at 80°C, and those with working temperatures exceeding 100°C are rare. The measurement of the pressure in the e...

AI Technical Summary

Problems solved by technology

In order to meet the pressure measurement in high temperature environment, the existing pressure sensor has a complex core structure, which leads to the complicated manufacturing process and high cost of the pressure sensor, which is not convenient for popularization and application.

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