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Substrate transfer robot driving device and substrate transfer method using the device

A substrate handling and driving device technology, which is applied in the directions of transportation and packaging, conveyor objects, semiconductor/solid-state device manufacturing, etc., can solve the problems of increasing time, reducing the productivity and qualification rate of electronic components, and preventing the rise of process costs, The effect of reducing process costs and improving productivity and yield

Active Publication Date: 2017-09-08
HYUNDAI ROBOTICS CO LTD
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Problems solved by technology

However, according to this solution, in the substrate transfer robot 1 in the prior art, the time required for the substrate transfer robot 1 to transfer the substrate increases, reducing the productivity and yield of the electronic components.

Method used

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  • Substrate transfer robot driving device and substrate transfer method using the device
  • Substrate transfer robot driving device and substrate transfer method using the device
  • Substrate transfer robot driving device and substrate transfer method using the device

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Embodiment Construction

[0041] Preferred embodiments of the substrate transfer robot according to the present invention will be described in detail below with reference to the drawings.

[0042] figure 2 It is a schematic block diagram of the substrate transfer robot drive device according to the present invention.

[0043] refer to figure 2 , the substrate handling robot driving device 100 involved in the present invention may include: a handling driving part 110, used for handling the supporting manipulator 214; a lifting driving part 120, used for driving the lifting arm 220, and the driving lifting arm 220 is used to The supporting manipulator 214 is raised and lowered in the direction; the rotating driving part 130 is used to drive the rotating part 230, and the rotating part 230 is used to rotate the rotating part of the lifting arm 220; the moving driving part 140 is used to drive the moving part 240, the The moving part 240 is used to move the rotating part 230; the snaking compensation d...

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Abstract

The present invention relates to a substrate transport robot drive device and a substrate transport method using the device. The substrate transport robot drive device includes: a transport drive unit, a lifting drive unit, a rotation drive unit, a movement drive unit, a snaking compensation derivation unit, and a control unit. Wherein, the control part distributes the snaking compensation value to at least one of the lifting drive part, the conveying drive part and the moving drive part in the first snaking direction, and distributes the snaking compensation value to the rotation drive part, At least one of the transport drive unit and the movement drive unit.

Description

technical field [0001] The present invention relates to a substrate conveying robot drive device for conveying substrates in the manufacturing process of electronic components and a substrate conveying method using the device. Background technique [0002] Display devices, solar cells, semiconductor elements, etc. (hereinafter referred to as "electronic components") are manufactured through various processes. Substrates for manufacturing electronic components are used in these manufacturing steps. For example, the manufacturing process may include a deposition process of depositing thin films such as conductors, semiconductors, and dielectrics on a substrate, and an etching process of forming the deposited thin films into a predetermined pattern. These manufacturing processes are completed in process chambers where related processes are carried out. And the substrate transfer robot is used to transfer the substrate between the process chambers. [0003] figure 1 It is a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G47/90H01L21/677
CPCH01L21/67715H01L21/67742
Inventor 金必峻尹大奎宋荣训金义镇
Owner HYUNDAI ROBOTICS CO LTD
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