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Convergent light polarization interference surface deviation detection device and method thereof

A technology for detecting deviations and converging optical paths, which is used in measuring devices, optical devices, instruments, etc. to reduce errors, improve accuracy, and eliminate background stray light.

Active Publication Date: 2015-10-14
FOCTEK PHOTONICS LNC
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  • Abstract
  • Description
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Problems solved by technology

It is used for the determination of the wavelength, not applied to the detection of the surface deviation of the lens

Method used

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  • Convergent light polarization interference surface deviation detection device and method thereof
  • Convergent light polarization interference surface deviation detection device and method thereof
  • Convergent light polarization interference surface deviation detection device and method thereof

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Embodiment Construction

[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] Such as Figure 1~4 As shown, the method scheme of the present invention is that the device used in the detection method is a polarization beam splitter 1 (the glued surface is coated with a polarization splitting dielectric film) formed by gluing the slopes of two equilateral rectangular prisms. The set fixed position focusing standard mirror 5, the fixed positioning laser beam expander 6 directly below the focusing standard mirror 5, and the polarizer 4 are arranged between the polarization beam splitter 1 and the detection laser light source 7, and the laser beam expander The laser light source 7 with a fixed position directly below the mirror 6, the first 1 / 4 wave plate 2 with a fixed position directly to the right of the polarization beam splitter 1, the movable back and forth waiter directly to the right of the first 1 / 4 ...

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Abstract

The invention relates to a convergent light polarization interference surface deviation detection device and a method thereof. The device comprises a polarization beam splitter, a light converging standard lens, a laser beam expander and a laser light source which are fixed just below the polarization beam splitter, a polarizer arranged between the polarization beam splitter and the detection laser light source, a first 1 / 4 wave plate and a lens to be tested which are sequentially fixed just at the right side of the polarization beam splitter, a receiving screen which is positioned and fixed just at the left side of the polarization beam splitter, an analyzer arranged just at the left side of the polarization beam splitter, as well as a second 1 / 4 wave plate and an optical sample plate which are positioned and fixed just above the polarization beam splitter. With the polarization interference method in which the above device is utilized adopted, two coherent light beams have approximately-equal light intensity, and the brightness of fringes can be adjusted, the influences of optical noises such as stray light can be inhibited, and high-contrast interference fringes can be obtained, and errors of later-stage image processing can be decreased, and the accuracy of lens detection can be improved, and light energy can be utilized maximally, and background stray light can be eliminated, and the contrast of the interference fringes can be improved.

Description

technical field [0001] The present invention relates to the purpose of the present invention to overcome the above-mentioned defects and provide a method for detecting the deviation of the polarization interference surface of the converging optical path, which is especially suitable for the detection method of the non-destructive inspection of the curvature radius deviation, astigmatism deviation and local deviation of spherical lenses. Background technique [0002] At present, the surface deviation of optical parts after polishing is usually detected by optical template or interferometer. The inspection method is based on the interference principle of light, and the surface deviation of optical parts is inspected in the optical workshop. The commonly used methods are interference pattern method and shadow Law. Interferogram method can be divided into contact method (i.e. template method) and non-contact method (i.e. interferometer method). [0003] In the optical works...

Claims

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Application Information

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IPC IPC(8): G01B11/24G01B11/255
Inventor 王敏黄德炜王芬林峰
Owner FOCTEK PHOTONICS LNC
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