Convergent light polarization interference surface deviation detection device and method thereof
A technology for detecting deviations and converging optical paths, which is used in measuring devices, optical devices, instruments, etc. to reduce errors, improve accuracy, and eliminate background stray light.
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[0029] The present invention will be further described in detail below with reference to the drawings and specific embodiments.
[0030] Such as Figure 1~4 As shown, the method scheme of the present invention is that the device used in the detection method is a polarizing beam splitter 1 (the glued surface is plated with a polarizing light splitting dielectric film), and the polarizing beam splitter 1 is directly below the two equilateral right-angle prisms. The fixedly positioned condenser standard lens 5, the fixedly positioned laser beam expander 6 directly below the condenser standard lens 5, and the polarizer 4 are arranged between the polarization beam splitter 1 and the detection laser light source 7, and the laser beam expands The fixedly positioned laser light source 7 directly below the mirror 6, the fixedly positioned first quarter-wave plate on the right side of the polarizing beam splitter 1, 2, and the first quarter-wave plate 2 can move back and forth on the right...
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