Positioning method for pattern-free silicon chip measurement
A positioning method and a pattern-free technology, which is applied in the direction of measuring devices, semiconductor/solid-state device testing/measurement, and optical devices, etc., can solve the problems of excessive beam measurement position deviation and measurement repeatability cannot be guaranteed, so as to improve the measurement Effect of repeatability, good measurement accuracy
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0026] In the following detailed description of the preferred embodiments, reference will be made to the attached drawings constituting a part of the present invention. The attached drawings illustrate specific embodiments capable of implementing the present invention by way of example. The illustrated embodiments are not intended to be exhaustive of all embodiments according to the present invention. It can be understood that without departing from the scope of the present invention, other embodiments may be used, and structural or logical modifications may also be made. Therefore, the following detailed description is not restrictive, and the scope of the present invention is defined by the appended claims.
[0027] When measuring silicon wafers, the following two factors cause the problem of low test repeatability during the wafer loading process:
[0028] 1. The translation of the wafer on the wafer, that is, the coordinate value of the center of the wafer on the wafer in the...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap