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Mems sensor and energy harvester for sensing plane omnidirectional vibration and method

An energy harvester, omni-directional technology, applied in the direction of instruments, measuring devices, electrical devices, etc., can solve difficult problems such as vibration sensing and vibration energy collection, and achieve the effect of small size, high integration and long life

Active Publication Date: 2018-09-18
冯跃
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Problems solved by technology

Existing research has made some progress in the field of two-degree-of-freedom vibration sensing and vibration energy harvesting in the plane, but the existing technology is limited to vibration in two specific directions, while sensing and vibration in other directions in the plane The energy harvesting efficiency is almost zero, and it is difficult to realize vibration sensing and vibration energy harvesting in all directions in the plane

Method used

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  • Mems sensor and energy harvester for sensing plane omnidirectional vibration and method
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  • Mems sensor and energy harvester for sensing plane omnidirectional vibration and method

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Embodiment Construction

[0028] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0029] Such as figure 1 with figure 2 As shown, the MEMS sensor with planar omnidirectional vibration of the present embodiment includes: a central vibrator 1, a spring 2, a fixed frame 3 and a signal processor; wherein, the central vibrator 1 is in the shape of a disc; a spring is connected to the peripheral edge of the central vibrator 2. The spring includes 4 concentric rings 21, and 4 support blocks 22 distributed symmetrically in the center are arranged between two adjacent rings to connect, and the support blocks between each adjacent ring are staggered; in the spring 2 The edge of the outer ring of the outer ring is connected to the fixed frame 3, and the fixed frame includes four electrodes 31 symmetrically distributed in the center, each electrode is electrically insulated, and two adjacent electrodes are connected by a flexible insul...

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Abstract

The invention discloses an MEMS sensor and energy acquisition device sensing planar omnidirectional vibration and a method thereof. The springs of a piezoelectric electret are connected with a circular-disc-shaped central oscillator and a fixing frame, and the piezoelectric effect is generated by the piezoelectric electret under the excited vibration so that conversion of vibration energy and electric signals can be realized. The spring are distributed in a concentric circle so that the equivalent piezoelectric effect of planar omnidirectional vibration is realized, objectives of vibration sensing and vibration energy acquisition are achieved, the system can act as the sensor and can also act as the energy acquisition device and advantages of 360-degree omnidirectional vibration sensing and vibration energy acquisition in the plane, small size, high degree of integration, great temperature property, high energy density, high vibration sensitivity, long service life and high reliability can be realized, and thus the MEMS sensor and energy acquisition device sensing planar omnidirectional vibration can be widely applied to earthquake dynamic sensing in the internet of things and power supply of wireless sensing network nodes, such as portable wearable equipment and an unattended wireless intelligent system.

Description

technical field [0001] The invention relates to a MEMS vibration sensor, in particular to a MEMS sensor, an energy harvester and a method for sensing plane omnidirectional vibration. Background technique [0002] In recent years, foreign scholars have carried out exploratory research on vibration sensing and energy harvesting technologies in two directions in the plane. Existing research has made some progress in the field of two-degree-of-freedom vibration sensing and vibration energy harvesting in the plane, but the existing technology is limited to vibration in two specific directions, while sensing and vibration in other directions in the plane The energy harvesting efficiency is almost zero, and it is difficult to realize vibration sensing and vibration energy harvesting in all directions in the plane. Contents of the invention [0003] Aiming at the problems existing in the above prior art, the present invention proposes a MEMS sensing and vibration energy acquisiti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H11/08H02N2/18
Inventor 冯跃
Owner 冯跃
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